Device and method for laser interferometry of inner cone angle

Abstract

A female cone angle laser interference measuring device and method are disclosed and belongs to the technical field of laser measurement. A contact measurement mode is currently available based on technologies of the prior art, and a work piece being tested can be damaged. In the measuring device disclosed in the invention, a laser device and a spectroscope are arranged on the same optical axis, the spectroscope and the optical axis form an included angle of 45 degrees, a microscope CCD is positioned on a reflection optical axis of the spectroscope, and the microscope CCD is connected with a computer; the measuring method disclosed in the invention is characterized in that a laser beam emitted by the laser device is split into a measuring light and a reference light via the spectroscope; a plane determined via intersection of an optical axis of the measuring light and an optical axis of the reference light overlaps with any meridian plane of a conical surface of a female cone device to be measured, the measuring light intersects with the reference light after being reflected twice, a position of a microscope CCD photosurface is adjusted along the optical axis of the reference light to a position where the measuring light intersects with the reference light, the microscope CCD sends an interference fringe image which is generated after the measuring light intersects with the reference light to the computer, an interference fringe interval is obtained after analyzing operation is conducted via the computer, and a female cone angle is calculated according to a formula shown in the description.

Description

technical field [0001] The invention relates to a laser interferometric measurement device and method for an inner cone angle, which uses laser interference technology to directly measure the inner cone angle with high precision and non-contact, and belongs to the technical field of laser measurement. Background technique [0002] Devices with inner conical surfaces are commonly used in high-precision machine tools, optical precision instruments, lasers, beam shaping and other fields. The existence of the inner cone angle error will directly affect the matching accuracy and service life of the device. Among them, the error of the inner cone angle is an important evaluation criterion for such parts or components. Existing methods for measuring the inner cone angle include direct measurement and indirect measurement, the former such as the three-coordinate detection method, and the latter such as the double-sphere measurement method. "The method of measuring the inner cone an...

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Problems solved by technology

[0004] Yet, there is following shortcoming in described two-ball measurement method: one, this method belongs to contact measurement, easily damages cone surface, as causes scratch, when cone surface is optical mirror surface, this damage is not allowed; Its two, This method requires the use of two measuring balls with a predetermined diameter. If the cone is shallow, the apex of the measuring ball is higher than the end face of the cone after the measuring ball is placed in the cone, and the measurement cannot be realized. Furthermore, the universality of the measuring ball is poor , if the scale range of the inner cone device to be tested is to be expanded, this method needs to prepare more measuring balls; third, the requirements for the inner cone device to be tested are more stringent, if the top of the cone is not a regular plane, the measurement difficulty will increase, Also introduces additional measurement error

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