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Apparatus and method for inspecting an object to be processed

A technology for objects to be processed and inspection devices, applied in the direction of nonlinear optics, instruments, optics, etc., can solve the problems of reducing the productivity of the overall process and reducing the efficiency of the process, so as to improve the process of defect causes, improve the efficiency of inspection, improve the efficiency and productive effect

Active Publication Date: 2017-01-11
CHARM ENG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In the prior art, various processes for inspecting defects of the substrate are not carried out in one device, but are carried out in different devices from each other, thereby reducing the process efficiency and thus the productivity of the overall process.

Method used

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  • Apparatus and method for inspecting an object to be processed
  • Apparatus and method for inspecting an object to be processed
  • Apparatus and method for inspecting an object to be processed

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Embodiment Construction

[0042] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the Examples disclosed below, and various forms different from each other can be realized. The embodiments of the present invention are provided only to make the disclosure of the present invention more complete, and are provided to inform those skilled in the art to which the present invention belongs the scope of the present invention. In order to explain the embodiments of the present invention, the drawings may be shown enlarged or exaggerated, and the same symbols in the drawings are referred to as the same elements.

[0043] figure 1 is a schematic diagram showing an inspection device according to an embodiment of the present invention, figure 2 is a partially enlarged view showing the inspection section of the inspection device according to the embodiment of the present invention. ...

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PUM

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Abstract

Proposed are an apparatus and a method for inspecting an object to be processed, for variously inspecting defects of the object in one apparatus when the defects of the object is inspected, which includes: a support unit for supporting an object to be processed; a removing unit arranged at an upper side of the support unit to remove a portion of a film formed at an upper part of the object by using a laser beam; an inspecting unit arranged at the upper side of the support unit to transmit and receive a signal by making contact to a device of the object; an optical arranged at the upper side of the support unit and toward the inspecting unit to observe the inspecting unit; and a control unit for controlling a movement of the inspecting unit by using an image observed at the optical unit.

Description

technical field [0001] The present invention relates to an inspection device, and more specifically relates to an inspection device and an object inspection method capable of inspecting defects of various objects to be processed with a single device when inspecting defects of an object to be processed. Background technique [0002] A flat panel display device such as a liquid crystal display (Liquid Crystal Display, LCD) or an organic light emitting display (Organic Light Emitting Display, OLED) has a lower substrate and an upper substrate facing each other, and a liquid crystal layer or an organic layer is filled between them, A plurality of electrode gate lines and data lines are formed on the lower substrate to form a matrix structure, and a plurality of pixels are formed therebetween. In order to individually drive pixels, an operating element (for example, a switching element) such as a thin film transistor is formed for each pixel. [0003] In addition, in the process...

Claims

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Application Information

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IPC IPC(8): G02F1/13
CPCG02F1/1309
Inventor 芮世熙
Owner CHARM ENG CO LTD
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