Dispatch system and dispatch method

A manufacturing execution system and process technology, applied in the field of dispatching systems, can solve the problems of long production cycle and large number of products, and achieve the effect of reducing the number of products, shortening length, and shortening production cycle

Active Publication Date: 2020-03-10
SEMICON MFG INT (SHANGHAI) CORP
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Problems solved by technology

[0004] However, the work-in-progress system and method in the prior art have the problems of too large quantity of work in progress and too long production cycle

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  • Dispatch system and dispatch method

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Embodiment Construction

[0041] It can be seen from the background technology that the existing labor dispatching system has the problems of too large quantity of work in progress and too long production cycle. This is because the existing labor dispatching systems focus on the local area and only check the operation of a single device itself and its upstream and downstream equipment, while the optimization of the dispatching system only focuses on the improvement of the utilization rate of a single device, so the existing The dispatching system can only guarantee the performance of the current equipment, but cannot average the utilization rate of the equipment in the manufacturing execution system. According to the queuing theory (Queuing Theory), when the difference in equipment utilization is greater, the situation of WIP queuing is more serious, and the number of WIP in the production line is larger. Therefore, there are problems in the existing labor dispatching system in the production line that...

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Abstract

The invention provides a dispatching system and a dispatching method. The method comprises a step of obtaining the optimal product configuration corresponding to the equipment in an equipment set through limiting the real-time data of equipment in a manufacturing execution system equipment set, the production periodic chart of a product and the process ability of the equipment, and a step of obtaining an equipment backward coefficient which reflect the operation condition of a system and an optical product configuration deviation according to the equipment historical data in the limited time, associating the equipment backward coefficient and a product to obtain a product backward coefficient, obtaining a dispatching order according to the sorting of product backward coefficient, and dispatching a semiconductor manufacturing execution system. Thus the equipment utilization rate of all equipment in a manufacturing execution system is averaged. In the condition that the overall production rate is not changed, the queue length of work-in-process products in front of the equipment is reduced, the number of the work-in-process products is reduced, and the purpose of shortening a production cycle is realized.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a dispatching system and a dispatching method. Background technique [0002] In a large-scale semiconductor manufacturing foundry, it is often necessary to produce a wide variety of chips at the same time, and due to the different processing techniques, processing time cycles and delivery dates of different chips. Therefore, for large-scale semiconductor manufacturing foundries, Manufacturing Execution System (MES) is widely used to arrange the operation and production of each equipment in the production line. [0003] However, the uncertainty of the semiconductor manufacturing system is greatly increased due to the re-entrant and ultra-high requirements of quality control, which makes it necessary to invest more WIP to maintain the high utilization rate of high-value manufacturing equipment. The pursuit of higher utilization (factory output) will result in more WIP, w...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B19/418
CPCG05B19/41845Y02P90/02
Inventor 许磊程杰杨颖尹俊
Owner SEMICON MFG INT (SHANGHAI) CORP
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