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Two-axis micro-motion platform based on flexible hinge

A technology of flexible hinges and micro-movement platforms, which is applied to the parts of instruments and instruments, can solve the problems of increasing the volume and weight of equipment, which is not conducive to miniaturization and lightweight design, and achieve the effect of improving torsional rigidity

Active Publication Date: 2017-01-11
北京航宇振控科技有限责任公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These additional parallel structures and measuring instruments increase the volume and weight of the equipment, which is not conducive to miniaturization and lightweight design

Method used

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  • Two-axis micro-motion platform based on flexible hinge
  • Two-axis micro-motion platform based on flexible hinge
  • Two-axis micro-motion platform based on flexible hinge

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Embodiment Construction

[0019] specific implementation plan

[0020] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings.

[0021] The invention provides a universal two-axis rotating micro-motion platform through the cleverly designed flexible hinge, so as to realize the miniaturization and light weight requirements of the photoelectric equipment. The two-axis micro-motion platform based on the flexible hinge includes: a flexible hinge, a driving part, a rotation angle feedback part, and a mechanical interface part.

[0022] The flexible hinge 10 is made of a cube of beryllium copper alloy or titanium alloy through four times of wire cutting to obtain four symmetrical flexible parts A1, A2, B1, B2, such as image 3 shown. The two edges of the diagonal of the rectangle obtain movement relative to this axis through elastic deformation. The A1-A2 flexible part in the figure produces a twist relative to the Y axis; the B1-B2 fle...

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PUM

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Abstract

The invention provides a two-axis micro-motion platform based on a flexible hinge. The platform comprises the flexible hinge, a driving part, a rotation angle feedback part and a mechanical interface part. A universal connection platform is connected with a base through the flexible hinge, and the universal connection platform rotates relative to the two axes of the base. The universal connection platform is driven by a voice coil motor-spring combination, so the universal connection platform can rotate at low amplitude and high frequency. The micro-motion platform achieves angle feedback through strain gauges attached to the flexible hinge, and accordingly high-precision rotation angle control is achieved. The flexible hinge is large in rigidity and small in size in the non-work direction, the strain gauges for measuring angles are small and light, and accordingly the micro-motion platform can achieve miniaturization and light weight. The micro-motion platform can load a mirror, a laser emitter, an electronic emission gun and other devices needing low-amplitude high-precision and high-frequency rotation.

Description

technical field [0001] The present invention designs a two-axis micro-motion platform based on flexible hinges. It belongs to the technical field of precision mechanical structure design. Background technique [0002] Microelectronics technology and laser processing technology are used more and more widely, and the requirements for precision are getting higher and higher. Among them, high-frequency, high-precision, high-resolution, small The two-axis rotating micro-motion platform with angular rotation is one of the key components that affect the performance of the equipment. The current equipment is mainly carried on a specially designed platform. The design cycle is long, the price is high, and the difficulty is high. There are few universal platforms. The invention describes a high-precision two-axis rotating micro-motion platform mechanism with low mechanism complexity. [0003] Flexible hinges use elastic materials or design a certain shape to achieve the characteris...

Claims

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Application Information

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IPC IPC(8): G12B5/00
CPCG12B5/00
Inventor 李伟鹏桂潇怡黄海
Owner 北京航宇振控科技有限责任公司
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