A kind of in-situ calibration method of sensor
An in-situ calibration and sensor technology, which is applied in the direction of instruments, measuring devices, and electrical devices, can solve problems such as inability to calibrate methods, inability to obtain quantitative calibration data, and inability to perform quantitative calibration, so as to improve work efficiency and reduce costs. Effect
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[0025] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0026] see figure 1 and figure 2 , as shown in the legend, as shown in the legend, an in-situ calibration method of the sensor is realized by the following steps:
[0027] (1) Provide a sensor 1 to be calibrated with an in-situ calibration function, make the sensor 1 to be calibrated in its working position (installed on the DUT 6) to be calibrated, and install the reference sensor 2 on the top surface of the sensor 1 to be calibrated , the sensitivity of reference sensor 2 is S 0 ;
[0028] (2) The excitation signal input line 5 is connected to the drive source 7 and the excitation signal input end 4 of the sensor 1 to be calibrated, and the sensor signal output line...
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