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Carrier buffering device and storage method

A temporary, carrier-based technology with applications in shipping and packaging, semiconductor/solid-state device manufacturing, conveyors, etc.

Active Publication Date: 2017-02-22
MURATA MASCH LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At this time, there is a possibility that the transfer signal may not be output to the communication terminal due to an error in the overhead traveling vehicle

Method used

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  • Carrier buffering device and storage method
  • Carrier buffering device and storage method
  • Carrier buffering device and storage method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0045] exist Figure 1 to Figure 12 The temporary storage device (temporary storage device) 2 of the carrier according to the embodiment and its modifications are shown in . The temporary storage device 2 is installed in a clean room, etc., and is supported from the ceiling of the clean room image 3 The running rails 4 and 6 of the illustrated overhead traveling vehicle 30 (OHT) are processing devices such as semiconductors, and the processing devices include inspection devices and include one to a plurality of loading ports 16 . In addition, items such as semiconductor wafers and reticles are stored in a carrier 18 such as a FOUP (Front-Opening Unified Pod), temporarily stored in a slide buffer 12 and a fixed buffer 14, and are connected by an overhead traveling vehicle (OHT) 30 and 10 trolleys are transported on the spot.

[0046] The temporary storage device 2 is arranged on the passage 7 in the clean room at a height that does not interfere with people. The on-site tro...

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PUM

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Abstract

This invention prevents interference between an overhead vehicle and a local vehicle even in a state in which a problem has occurred in the overhead vehicle and communication between the overhead vehicle and a controller is not possible. Carriers are buffered between the overhead vehicle and a load port, the local vehicle is made to travel along a local-vehicle rail that is below a rail for the overhead vehicle and directly above the load port, and a plurality of buffers are provided. The overhead vehicle and the local vehicle can communicate with the abovementioned controller via terminals, and a sensor that detects a hoist element of the overhead vehicle and carriers being raised or lowered is provided at a height at which said sensor does not interfere with the local vehicle. When said sensor detects a hoist element or a carrier, travel of the local vehicle is restricted.

Description

technical field [0001] The present invention relates to temporary storage of carriers containing semiconductor wafers and the like. Background technique [0002] In order to increase the operating rate of semiconductor processing equipment, it is required to install a temporary storage device (buffer zone) near the loading port. Regarding this, the applicant proposed in Patent Document 1 (JP2012-111635) that it is parallel to a running rail of an overhead traveling vehicle (OHT: Overhead Hoist Transport) and that a running rail of a local trolley is provided below it. In addition, if the buffer zone that can be transferred by both the local trolley and the elevated trolley is provided at a part other than the travel guide rail of the local trolley and directly above the loading port, for example, four buffer zones can be provided. . In the case that the number of buffer zones is insufficient, consider adding a lateral conveying mechanism between the elevated trolley and th...

Claims

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Application Information

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IPC IPC(8): H01L21/677
CPCH01L21/67259H01L21/67733H01L21/67736H01L21/67769B65G2201/0297
Inventor 高井要
Owner MURATA MASCH LTD