Straight-hole type spraying plate capable of preventing hollow cathode discharge
A hollow cathode discharge and spray plate technology, which is applied in the manufacture of circuits, electrical components, semiconductor/solid-state devices, etc., can solve problems such as arc discharge, achieve simple structure, improve process stability, and avoid glow discharge.
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[0017] Reference Figure 1-Figure 3 , A straight-hole spray plate for preventing the discharge of a hollow cathode, comprising a spray plate body 1 with fixed screw holes 3, and a small hole 2 on the spray plate body 1.
[0018] The small hole 2 adopts a slender structure;
[0019] The ratio of the diameter to the length of the small hole 2 reaches 1:6 or more, and the maximum is 1:15;
[0020] The small holes 2 are distributed in an equilateral triangle array, and the opening area is slightly larger than the wafer area.
[0021] In the present invention, since the small hole 2 adopts a slender straight hole structure, the flow resistance of the hole is large, and there is a large pressure difference between the back and the front of the spray plate. Therefore, after the process gas is fully mixed from above the spray plate body 1, It can be ejected from the small hole 2 evenly. During the process, free electrons consume a certain amount of energy when passing throug...
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