MOEMS wireless vibration sensor based on comb grid and operation method thereof

A wireless vibration and sensor technology, used in instruments, signal transmission systems, measurement devices, etc., can solve the problems of high integration, small sensor size, difficult sensor layout and lead wires, etc.

Active Publication Date: 2017-05-10
SHANDONG UNIV +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In order to solve the above problems, the present invention proposes a comb grid-based MOEMS wireless vibration sensor and its working method. The sensor realizes the measurement and wireless transmission of external vibration signals. The status quo of sensor layout and wiring difficulties in large-scale engineering monitoring projects such as tunnels and bridges with optical fiber vibration sensors

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  • MOEMS wireless vibration sensor based on comb grid and operation method thereof
  • MOEMS wireless vibration sensor based on comb grid and operation method thereof
  • MOEMS wireless vibration sensor based on comb grid and operation method thereof

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Embodiment Construction

[0031] Below in conjunction with accompanying drawing and implementation method, the present invention will be further described:

[0032] A MOEMS wireless vibration sensor based on a comb grid 11 mainly includes a sensor housing 8, a micro light source 1, a transmission fiber, a collimator 3, a vibration sensitive source 4, a photoelectric conversion module 5, a data analysis module 6 and a wireless transmission module 7 .

[0033] The MOEMS wireless vibration sensor is packaged in the sensor housing 8, and its modular and highly integrated design makes the sensor small in size, which overcomes the current situation that the existing optical fiber vibration sensor is difficult to arrange and lead in large-scale engineering monitoring projects such as tunnels and bridges.

[0034] The miniature light source 1 includes three parts: a power supply unit, a light emitting unit, and an output optical fiber pigtail 2 connected in sequence;

[0035] The vibration sensitive source 4 ...

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Abstract

The invention discloses an MOEMS wireless vibration sensor based on a comb grid and an operation method thereof. The MOEMS wireless vibration sensor comprises a sensor housing. A miniature light source is connected with a vibration sensitive source through a transmission optical fiber. Collimators are fixed at two sides of the vibration sensitive source. The output end of the vibration sensitive source is connected with a photoelectric conversion module through the transmission optical fiber. The photoelectric conversion module is successively connected with a data analysis module and a wireless transmission module. The MOEMS wireless vibration sensor has a beneficial effect of requiring effective contact between the sensor and a measured object in monitoring, and furthermore a wireless transmission function of a detecting signal effectively overcomes a defect of high difficulty in sensor arrangement and wiring in large-size engineering structure monitoring such as channel and bridge.

Description

technical field [0001] The invention belongs to the technical field of optical fiber sensing, and in particular relates to a MOEMS wireless vibration sensor and a working method thereof, which realize encoding of sensor light intensity signals by external vibration signals through comb-shaped grids and have a wireless signal transmission function. Background technique [0002] Micro-opto-electro-mechanical system (MOEMS) is a very dynamic new technology system developed in micro-electro-mechanical system (MEMS) in recent years. It is a combination of micro-optics, micro-electronics and micro-mechanics. A new type of micro-optical structure system. MOEMS is widely used in optical communication and image processing because of its advantages of mass production, small size, and high precision. There are relatively few patent reports in the field of engineering detection and sensing. [0003] Chinese patent CN102483427A provides a CMOS MOEMS sensor that can be used to detect phy...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01H9/00G08C17/02
CPCG08C17/02G01H9/00
Inventor 王静蒋善超隋青美田长彬李亦佳贾磊曹玉强张法业
Owner SHANDONG UNIV
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