Integrated force sensing element
A sensing element, integrated force technology, applied in the field of integrated force sensing elements, which can solve problems such as stability concerns, non-sensing interaction force or speed, etc.
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[0038] Specific embodiments of the present invention will now be described in detail with reference to the accompanying drawings. In the following detailed description of the embodiments of the invention, numerous specific details are set forth in order to provide a more thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without these specific details. In other instances, well known features have not been described in detail to avoid unnecessarily complicating the description.
[0039] Referring now to the schema, and more precisely to the Figure 1A and 1B , showing a top view and a side view of the integrated force sensing device 100 according to an embodiment of the present invention. The switch 100 includes a piezoelectric sensor 102 and a strain gauge 104 . In the embodiment seen in this figure, piezoelectric sensor 102 includes an array of ferroelectric capacitors 102A, 1...
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