Resonance-enhanced ultraviolet light detector based on subwavelength grating and its preparation method

Abstract

The invention provides a sub-wavelength grating based resonance enhanced ultraviolet light detector and a preparation method thereof. The ultraviolet light detector includes a substrate, a sub-wavelength grating layer and an epitaxial layer. The epitaxial layer is provided with n-type contact electrode and a p-type contact electrode. The patterns of the sub-wavelength grating layer are periodical or non-periodical grating patterns. By utilizing a characteristic of high refractive index of sapphire material, the sub-wavelength grating having high nano-scale refractivity and compatible to CMOS technique is obtained. High quantum efficiency is achieved in a wide spectrum range. By utilizing a broadband spectrum light reflex characteristic of sub-wavelength grating, incoming light is reflected by the sub-wavelength grating after passing through an absorption area and then passes through the device absorption area again, so that absorption is enhanced and device quantum efficiency is improved. At the same time, a broadband spectrum response (greater than 400 nm) covering an optical fiber communication long wavelength low loss window is obtained. Besides, the device and the preparation method thereof are low in cost, simple in technique and easy to implement.

Description

technical field [0001] The invention relates to the technical field of ultraviolet light communication, and more specifically, to a resonance enhanced ultraviolet light detector based on a sub-wavelength grating and a preparation method thereof. Background technique [0002] Since the advent of the first optical fiber, optical fiber communication using photons as a transmission carrier has been favored by more and more people due to its advantages such as large capacity, light weight, low price, strong resistance to electromagnetic interference, and corrosion resistance. It has begun to gradually replace the communication method using electrons as the transmission carrier in many applications. With the commercialization of 10Gbit / s optical fiber communication system, 40Gbit / s optical fiber communication system can be realized, and 100Gbit / s optical fiber communication system has also become an ideal choice for the next generation communication system. [0003] In the develo...

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Problems solved by technology

[0006] The present invention provides a sub-wavelength grating-based resonance-enhanced ultraviolet light detector and a preparation method that overcome the above-mentioned problems or at least partially solve the above-mentioned problems, and solve the mutual restriction problem between the quantum efficiency and frequency response bandwidth of traditional ultraviolet light detectors. It has the advantages of wide spectral response range, high quantum efficiency, simple manufacturing process, high response bandwidth, etc., and can be widely used in the field of ultraviolet light communication

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