Quality inspection method and system of polycrystalline silicon film

Abstract

The invention provides a quality inspection method of a polycrystalline silicon film. The method comprises the steps of irradiating light on a substrate with the polycrystalline silicon film formed on the surface, and shooting to acquire a film image; determining optimum energy density according to the brightness of the film image; dividing the film image into a plurality of image units according to a preset dimension; acquiring display parameters of the polycrystalline silicon films in the image units, acquiring a comparison result, and calculating the optimum energy density; acquiring the number of qualified image units according to the comparison result; judging whether the polycrystalline silicon film is qualified or not according to the number of the qualified image units and the total number of the image units, if not, controlling processing equipment to carry out laser annealing treatment on the polycrystalline silicon film, and if so, finishing inspection. The invention also provides a quality inspection system of the polycrystalline silicon film. According to the quality inspection method of the polycrystalline silicon film and the quality inspection system of the polycrystalline silicon film, provided by the invention, the inspected sub-quality products can be re-processed to obtain the qualified products, and meanwhile, the optimum energy density is acquired, so that the acceptability of the products is improved.

Description

technical field [0001] The invention relates to the field of display device detection, in particular to a quality detection method for polysilicon thin films. Background technique [0002] Patent CN201510408380.7 discloses a quality detection method and system for polysilicon thin films, and provides a solution for judging the quality of polysilicon thin films by taking images. The flow chart is as follows figure 1 As shown, the existing problems only disclosed the detection method and system, but did not disclose how to select the optimal energy density value to ensure that the unqualified products will be eliminated during the reprocessing annealing treatment when unqualified products are detected. Processing makes it a qualified product. Contents of the invention [0003] The invention aims to solve the technical problem in the prior art that if defective products exceed a certain proportion, the products will be scrapped directly, resulting in waste of production cost...

AI Technical Summary

Problems solved by technology

[0003] The present invention aims to solve the technical problem in the prior art that if defective products exceed a certain percentage in the polysilicon film quality detection method, the product will be scrapped directly, resulting in waste of production cost

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