Translational and rotational 3-degree-of-freedom piezoelectric driving adjusting device and method
An adjustment device, piezoelectric drive technology, applied in the field of precision instruments, can solve the problems of low transmission accuracy, large volume, electromagnetic leakage and so on
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[0033] The present invention will be further described in detail below in conjunction with the drawings and specific embodiments.
[0034] Such as figure 1 As shown, a three-degree-of-freedom piezoelectric drive adjustment device of the present invention that can realize translation and rotation includes: a loading platform 5, a first translation mechanism 1 in the X direction and a first translation mechanism 1 in the X direction on the side surface of the loading platform 5 Two translational mechanisms 3, a first translational mechanism 2 in the Y direction, a second translational mechanism 4 in the Y direction, and a Z-direction deflection mechanism 6 located at the bottom of the loading platform 5.
[0035] Such as figure 2 As shown, the X-direction first translation mechanism 1 and the X-direction second translation mechanism 3 have the same structure, and are connected by an X-direction base 1-1 formed by a metal frame with greater rigidity; wherein, the X-direction second A...
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