Gas concentration two-dimensional distribution on-line detection system and method

Abstract

The invention discloses a gas concentration two-dimensional distribution on-line detection system and method, and belongs to the technical field of laser spectroscopy gas on-line detection. Compared with the prior art, the system has the advantages that a laser beam splitting cabinet splits a laser path emitted from a laser control cabinet into a plurality of paths of detection light paths and a one-path reference light path in reticular distribution; the multi-path detection light paths and the one-path reference light path respectively pass through a target gas region to be detected and a reference target gas region and are then received by a data receiving cabinet; a computer calculates the gas concentration two-dimensional distribution data according to the multi-path detection light paths and the one-path reference light path processed by the data receiving cabinet. The method has the advantages that the absorption coefficient of target gas in each pixel is calculated according to the integral light absorption degree of each path of detection light path and the light path in each pixel; the two-dimensional concentration value of target gas in a target gas region to be detected is calculated by referring to each known parameter of the target gas region. The gas environment in the industrial production process can be precisely reflected through calculating the two-dimensional concentration value of the target gas.

Description

technical field [0001] The invention relates to the technical field of laser spectrum gas online detection, in particular to an online detection system and method for two-dimensional distribution of gas concentration generated in industrial processes. Background technique [0002] Modern industrial processes usually involve a relatively complex atmosphere environment. Atmospheric conditions are of great significance to the process control and safety of the production process. For example, in the combustion process, the emission monitoring of pollutants can provide information and provide information for It provides a basis for the control of the combustion process; in the metallurgical and chemical industries, accurate measurement of the gas generated in the process can provide a reliable basis for the judgment of the end point of the process; in the production process of semiconductor materials and devices, it is necessary to use High-purity gases are used as protective gas...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a gas concentration two-dimensional distribution online detection system and method to solve the problem that the existing technology cannot directly obtain the two-dimensional distribution parameters of the gas concentration and cannot truly and objectively reflect the atmospheric conditions in the production process

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