Method for measuring tft electrical properties of ltps display panel
A display panel and electrical technology, applied to static indicators, instruments, etc., can solve the problems of inaccurate and difficult electrical measurement of TFT, and uneven etching of Al surface, so as to improve the measurement success rate, avoid measurement deviation, Guarantee the effect of product yield
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[0033] In order to further illustrate the technical means adopted by the present invention and its effects, the following describes in detail in conjunction with preferred embodiments of the present invention and accompanying drawings.
[0034] see Figure 8 , the present invention provides a method for measuring the TFT electrical properties of an LTPS display panel, comprising the steps of:
[0035] Step S1, providing an LTPS display panel to be tested, such as figure 1 and figure 2 shown, said figure 1 This is the sectional view of the LTPS display panel to be tested along the direction perpendicular to the gate lines 52, figure 2 This is the sectional view of the LTPS display panel to be tested along the gate line 52. The LTPS display panel to be tested includes: a substrate 1, a buffer layer 2 disposed on the substrate 1, a buffer layer 2 disposed on the buffer The active layer 3 on the layer 2, the gate insulating layer 4 disposed on the active layer 3 and the buff...
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