TFT substrate vapor deposition method
A substrate and evaporation technology, applied in the direction of semiconductor devices, electrical components, circuits, etc., can solve the problem of color mixing of TFT substrates, and achieve the effect of avoiding the formation of color mixing
Active Publication Date: 2017-06-30
KUNSHAN NEW FLAT PANEL DISPLAY TECH CENT +1
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Problems solved by technology
[0003] The purpose of the present invention is to provide a method for evaporation of TFT substrates to solve the technical problem of color mixing in the evaporation process of TFT substrates in the prior art
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[0028] The evaporation method of the TFT substrate of the present invention will be described in more detail below in conjunction with the schematic diagram, wherein a preferred embodiment of the present invention is shown, it should be understood that those skilled in the art can modify the present invention described here, and still realize the present invention beneficial effect. Therefore, the following description should be understood as the broad knowledge of those skilled in the art, but not as a limitation of the present invention.
[0029] In the following paragraphs the invention is described more specifically by way of example with reference to the accompanying drawings. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiment...
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Abstract
The invention provides a TFT substrate vapor deposition method. The TFT substrate vapor deposition method comprises depositing a first isolation material on a glass substrate, etching the first isolation material selectively, and forming several first openings which are arranged in an array in the first isolation material with the first openings being exposed in the surface of the glass substrate; arranging a metal line on the glass substrate with the metal line at least covering the bottom wall and the sidewall of each first opening; filling each first opening with a luminescent material; depositing a second isolation material on the TFT substrate, etching the second isolation material selectively, forming several second openings which are arranged in an array in the second isolation material with the second openings being exposed in the surface of the TFT substrate; arranging the glass substrate and the TFT substrate in an opposite manner, aligning the first openings to the second openings, providing voltage for the metal line, and depositing the luminescent material in the second openings in the TFT substrate in a vapor manner. According to the invention, the luminescent material can be deposited on the TFT substrate in the vapor manner with no need of a metal mask plate, colour mixture of the TFT substrate is avoided, and the PPI is increased.
Description
technical field [0001] The invention relates to the technical field of display panels, in particular to an evaporation method for a TFT substrate. Background technique [0002] The manufacturing process of the active matrix organic light emitting diode panel (Active Matrix Organic Light Emitting Diode, AMOLED) device is divided into: a substrate process, an evaporation process and a packaging process. The substrate process is to laminate silicon material and metal material on the glass to form a thin film transistor (Thin Film Transistor, TFT). In order to use the formed TFT substrate to light up the AMOLED panel, it is necessary to perform an evaporation process of organic matter on the TFT substrate. The evaporation process of organic matter is to vapor-deposit the vaporized organic matter on the TFT substrate. In the existing evaporation process, a metal mask with an array structure is used to form an opening in the middle of the metal mask, and the metal mask is covered...
Claims
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Login to View More IPC IPC(8): H01L51/56
CPCH10K71/166
Inventor 邓亮习王锋刘晓佳翁家峰
Owner KUNSHAN NEW FLAT PANEL DISPLAY TECH CENT