Micro mirror surface warp degree detection device and detection method
A detection device and detection method technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of high cost of use, low accuracy of warpage measurement, expensive optical profiler equipment, etc., and achieve the calculation method Simple, no-data-processing effects
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[0027] The specific embodiments of the detection device and the detection method for the degree of warpage of the micromirror provided by the present invention will be described in detail below with reference to the accompanying drawings.
[0028] First, a specific implementation of the device for detecting the degree of warpage of the micromirror surface of the present invention is given in conjunction with the accompanying drawings. Attached figure 1 It is a schematic diagram of the structure of the device described in this specific embodiment, including: a sample stage 10, an incident light module 11, a reflected light module 12, and a driving module 13. Attached figure 1 It is only shown as an illustration, and is not used as a basis for measurement. In actual operation, the size of the chip sample to be tested is very small, only millimeter-level, but the size of the chip sample stage is cm-level to ensure that the chip can be placed horizontally. In this specific embodiment...
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