Electronic device, method for manufacturing electronic device, and physical-quantity sensor
A technology of physical quantity sensor and electronic device, which is applied in the field of physical quantity sensor and can solve the problems such as the decrease of the accuracy of sensor elements.
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Embodiment approach 1
[0080] The structure of the accelerometer
[0081] use figure 1 , figure 2 , the configuration of the acceleration sensor as the electronic device according to Embodiment 1 of the present invention will be described. figure 1 It is a plan view showing the outline of the acceleration sensor according to the first embodiment. figure 2 It is a cross-sectional view showing the outline of the acceleration sensor. figure 1 This is a top view with the cover (cover body) omitted (see through).
[0082] In each figure, the description is made in such a manner that the direction in which the cover portion as the cover is arranged is referred to as the upward direction, and the direction in which the base plate of the package is arranged is referred to as the upper direction based on the sensor element as the functional element. is the downward direction, and among components such as sensor elements, bottom plates, side walls, and ICs, the surface arranged upward is called the uppe...
Embodiment approach 2
[0188] The structure of the physical quantity sensor
[0189] First, a schematic configuration of a physical quantity sensor according to Embodiment 2 will be described. Figure 14 It is a schematic cross-sectional view of the physical quantity sensor according to the second embodiment. Figure 15 It is a plan view of the physical quantity sensor according to the second embodiment. Figure 14 equivalent to along Figure 15 A cross-sectional view of line A-A'. exist Figure 15 In , illustration of the first substrate (package 70 ) is omitted, and the cover member 60 is shown through.
[0190] In addition, in each figure, for convenience of description, X-axis, Y-axis, and Z-axis, which are three mutually orthogonal axes, are shown with arrow marks, and the front end side of the arrow marks is "+", and the base The end side is set to "-". In addition, hereinafter, the direction (first direction) parallel to the X-axis is referred to as "X-axis direction", and the direction...
Embodiment approach 3
[0254] Next, physical quantity sensor 500 according to Embodiment 3 will be described. Figure 20 It is a plan view of the physical quantity sensor according to the third embodiment. The physical quantity sensor 500 according to Embodiment 3 differs from the structure of Embodiment 2 in that the adhesive 50 is not continuous in the Y-axis direction but is applied so as to be divided into at least two places. About the structure other than that, it is the same as that of Embodiment 2. In addition, the same reference numerals are used for the same components as those in Embodiment 2, and overlapping descriptions are omitted.
[0255] like Figure 20 As shown, the physical quantity sensor 500 according to the third embodiment is the same as the physical quantity sensor 400 according to the second embodiment, and includes a first sensor element 410, a second sensor element 420, two third sensor elements 430, a second substrate 440, Cover member 60 (refer to Figure 14 ), packa...
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