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Scale and position-measuring device having such a scale

A technology for measuring devices and measuring tools, which is applied in the direction of measuring devices, using optical devices, and using optical devices to transmit sensing components. The analytically simple effect of

Active Publication Date: 2017-08-01
DR JOHANNES HEIDENHAIN GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Bright areas thus appear less bright and the light-dark contrast of the amplitude grating is reduced

Method used

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  • Scale and position-measuring device having such a scale
  • Scale and position-measuring device having such a scale

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Experimental program
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Embodiment Construction

[0013] figure 1 The prior art mentioned at the outset is shown. The measuring tool MV is constructed on a carrier T which consists, for example, of a material with a particularly low coefficient of thermal expansion, for example of glass ceramics available under the trade name Zerodur. Other materials, such as quartz glass, float glass or also steel, are also suitable for the carrier T. A reflective layer S is deposited on the carrier T, which can be, for example, a vapor-deposited aluminum layer or also a gold layer. This is followed by a spacer layer A, which may be a SiO2 layer with a refractive index n=1.48. In the dark regions of the measuring standard MV, which is designed as an amplitude grating, there follows a partially transparent layer M, which can be designed as a chromium layer with a thickness of a few nanometers. Silicon would also be a suitable material for the partially transparent layer. The partially transparent layer M is first deposited over the entire...

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PUM

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Abstract

The invention relates to a scale and a position measuring apparatus having same, and discloses a scale having amplitude grating. A scale for an optically scanning position-measuring device includes a carrier and a reflective layer disposed on the carrier. A transparent spacer layer is disposed on the reflective layer. The spacer layer has a patterned, partially transparent layer thereon which defines a bright / dark pattern in which regions having the partially transparent layer appear dark and regions without the partially transparent layer appear bright. A sealing layer is disposed on the patterned, partially transparent layer. Products of refractive index and layer thickness are the same for the spacer layer and the sealing layer, or differ by an odd multiple.

Description

technical field [0001] The invention relates to a measuring standard for an optical position measuring device and to a position measuring device having such a measuring device. In position-measuring devices, such a measuring standard is scanned by a scanning head with the aid of light in order to detect displacements between the measuring standard and the scanning head. Background technique [0002] A measuring gauge in the form of an amplitude grating is known from DE 10236788 A1. The amplitude grating (Amplitude grating) includes a substrate, and a reflective layer is arranged on the substrate. The reflective layer is followed by a transparent spacer layer, on which in turn a partially transparent layer is deposited. The partially transparent layer is structured by partial removal. Light incident on the partially transparent layer is partially reflected and transmitted. The reflected light is canceled out by destructive interference (ausgelöscht) with the transmitted l...

Claims

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Application Information

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IPC IPC(8): G01D5/34G01D5/26G01B11/00
CPCG01B11/00G01D5/266G01D5/34G01D5/38G02B5/1861G01D5/264G01D5/30
Inventor S.丰克P.施佩克巴歇尔
Owner DR JOHANNES HEIDENHAIN GMBH