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Holder assembly for collaboration with nanoreactors and electron microscopes

A nano-reactor, electron microscope technology, applied in the direction of electrical components, circuits, discharge tubes, etc., can solve the problems of the retainer assembly being difficult to manipulate tiny sealing members, leakage, etc.

Active Publication Date: 2019-09-20
FEI CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The problem with the holder assembly is that it is difficult to manipulate the tiny sealing members, and leaks often occur on the sealing members into the vacuum of the electron microscope

Method used

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  • Holder assembly for collaboration with nanoreactors and electron microscopes
  • Holder assembly for collaboration with nanoreactors and electron microscopes

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0025] figure 1 The distal portion of the holder and the nanoreactor are schematically shown.

[0026] The nanoreactor 100 (also called nanocell, microreactor or environmental chamber) is formed by two chips 102 and 106 attached to each other by an adhesive in the form of a sealing element 110 . Chip 102 includes electron transparent window 104 and chip 106 includes electron transparent window 108 . The windows are aligned such that an electron beam irradiating perpendicular to the chip can pass through both windows simultaneously. A closed volume 112 is formed between the two chips, capable of admitting the fluid to be viewed into said closed volume 112 via a fluid inlet 114 .

[0027] The holder assembly 120 has a recess with a "floor" 122 into which the nanoreactor 100 fits. In said recess, a further recess 138 is formed in the form of a ring. The other recess is connected to the pre-vacuum tube 132 . When the nanoreactor is attached to the holder assembly, a pre-vacuu...

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Abstract

The present invention relates to a holder assembly for cooperating with a nanoreactor and an electron microscope having a distal end portion holding the nanoreactor, the electron microscope being irradiated with electron beams having first and second electron transparent windows respectively. The nanoreactor of the second chip, the chip enclosing the closed volume, the electron transparent window aligned, the first chip has the fluid inlet fluid outlet, in operation the distal part is in the evacuated part of the electron microscope, the nanoreactor is attached to the distal part, It has a fluid supply channel and a fluid outlet tube, the fluid supply sealing element and the fluid outlet sealing element seal the connection between the fluid inlet and the fluid supply channel, the holder assembly includes a recess that is remotely located when the nanoreactor is attached to the holder assembly A sealed pre-vacuum volume evacuated by a pre-vacuum channel is formed between the end and the first flat layer, and the above-mentioned sealing element is exposed to the empty pre-vacuum volume so that leakage of fluid via the sealing element is pumped away via the pre-vacuum channel without entering the evacuation part.

Description

technical field [0001] The present invention relates to a holder assembly for cooperating with a nanoreactor and an electron microscope which in operation irradiates the nanoreactor with an electron beam, said holder assembly having means for holding the nanoreactor The distal portion of the nanoreactor has: a first planar layer with a first electron transparent window; and a second planar layer with a second electron transparent window, the first planar layer and the first Two planar layers enclosing an enclosed volume, the first electronically transparent window aligned with the second electronically transparent window, the first planar layer having a fluid inlet for fluid into the enclosed volume, the retainer assembly The distal part of the nanoreactor is in operation placed in an evacuated part of the electron microscope to which the nanoreactor is attached, the distal part has a central hole for the passage of the electron beam, so said central aperture is operatively a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/20
CPCH01J37/20H01J2237/022H01J2237/2003H01J2237/2605H01J2237/2802
Inventor P.多纳L.梅勒
Owner FEI CO