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Vibrator device, method of manufacturing vibrator device, electronic apparatus, and moving object

A vibration device and manufacturing method technology, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, measuring devices, gyroscope/steering sensing equipment, etc., can solve the problem of wire cutting, wiring width narrowing, and easy Problems such as disconnection

Inactive Publication Date: 2017-08-08
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the wiring is provided in the narrow area of ​​the front and back in this way, there is a possibility that the width of the wiring is narrowed to easily cause problems such as disconnection, or the wiring that is provided on the front and back may occur. The line is cut off during frequency adjustment, etc.

Method used

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  • Vibrator device, method of manufacturing vibrator device, electronic apparatus, and moving object
  • Vibrator device, method of manufacturing vibrator device, electronic apparatus, and moving object
  • Vibrator device, method of manufacturing vibrator device, electronic apparatus, and moving object

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0054] A gyro element (H-type gyro element) as a vibration element according to the first embodiment of the vibration device of the present invention will be described. First, refer to figure 1 , figure 2 , image 3 , Figure 4 as well as Figure 5 , the structure of the gyro element (H-type gyro element) serving as the vibrating element will be described. figure 1 It is a plan view showing the outline of a gyro element (H-shaped gyro element) as a vibration element according to the first embodiment of the vibration device. figure 2 is a diagram explaining the electrode structure of a gyro element (H-type gyro element), and is figure 1 A-A cutaway view. image 3 is a diagram explaining the electrode structure of a gyro element (H-type gyro element), and is figure 1 The B-B section view. Figure 4 is a diagram explaining the electrode structure of a gyro element (H-type gyro element), and is figure 1 C-C section view. Figure 5 It is a diagram showing the electrical...

no. 2 approach

[0122] A gyro element (H-type gyro element) as a vibration element according to a second embodiment of the vibration device of the present invention will be described. First, refer to Figure 8 , the structure of the gyro element (H-type gyro element) will be described. Figure 8 It is a partial plan view showing the outline of a gyro element (H-shaped gyro element) as a vibration element according to the second embodiment of the vibration device. In addition, in Figure 8 In the description, the gyro element (H-shaped gyro element) will be described centering on the portion of the detection arm whose structure is different from that of the first embodiment described above. In addition, below, the same code|symbol is attached|subjected to the same structure as 1st Embodiment mentioned above, and the description is abbreviate|omitted.

[0123] 1. Structure of gyro components

[0124] Such as Figure 8 As shown, the gyro element 400 according to the second embodiment has a ...

no. 3 approach

[0152] Next, refer to Figure 11 , the gyro sensor according to the third embodiment of the vibration device of the present invention will be described. Figure 11 It is a front cross-sectional view showing a schematic configuration of a gyro sensor according to a third embodiment of the vibration device according to the present invention. exist Figure 11 In the gyro sensor 600 according to the third embodiment of the vibrating device shown, the gyro element (the H-type gyro Component) 300 structure.

[0153] Such as Figure 11As shown, the gyro sensor 600 accommodates the gyro element 300 in the concave portion of the package 610 , and the opening of the package 610 is sealed by the lid 616 to keep the inside airtight. The package 610 is formed by laminating and adhering a flat first substrate 611 , a second substrate 612 , a frame-shaped third substrate 613 , and mounting terminals 614 . A plurality of mounting terminals 614 are formed on the outer bottom surface of th...

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Abstract

The invention relates to a vibrator device, a method of manufacturing the same, an electronic device and a moving object. Break line of wiring short-circuited to each other of an electrode configured to a diagonal direction of the inner side surface of a perorating hole arranged on a vibration arm. The vibrator device includes a first vibration arm (detection arm) that has walls located on both sides with the through hole, which is penetrated through front and rear surfaces, interposed therebetween; and two electrodes in which the walls are arranged on two internal surfaces located on the walls of the through hole, to which mutually different potentials are applied, and which extend in parallel along the front and rear surfaces. Of the electrodes, a first electrode (first detection electrode) located on the front surface side of one of the internal surfaces and a second electrode (second detection electrode) located on the rear surface side of the other internal surface are short-circuited by a first wire disposed on one of end side surfaces connecting the two internal surfaces.

Description

technical field [0001] The present invention relates to a vibrating device, a method for manufacturing the vibrating device, electronic equipment, and a mobile body. Background technique [0002] Conventionally, an inertial sensor element having a vibrating arm portion (vibrating arm, detecting arm) is known as an example of a vibrating device (for example, refer to Patent Document 1). For example, in the inertial sensor element disclosed in Patent Document 1, two electrodes are provided on the same side face connecting the front and back (main surfaces) of the vibrating arm part, and along the extending side of the vibrating arm part. The electrodes extend in two directions, and the electrodes are divided into two and provided on the inner sides of the through holes provided through the front and back of the vibrating arm part. In the vibrating arm portion, two electrodes are provided on each inner surface of the through hole so that a total of four electrodes are provided...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5621G01C19/5628
CPCG01C19/5621G01C19/5628G01C19/5607H10N30/875H10N30/06H10N30/20H10N30/8542
Inventor 市川史生
Owner SEIKO EPSON CORP