A 121.6nm narrow-band negative filter and its preparation method
A filter and narrow-band technology, applied in the field of optical filters, can solve the problems of high reflectivity in the sideband and visible light bands, reduce the quality of 121.6nm spectral lines, etc., and achieve the effect of improving quality
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[0044] The embodiment of the present invention discloses a preparation method of a 121.6nm narrow-band negative filter, see figure 1 As shown, the method includes:
[0045] Step S11: Determine the coating material of the multilayer film and the corresponding basic film system structure required for the preparation of the 121.6nm narrow-band negative filter.
[0046] In this embodiment, specifically, LaF 3 (i.e. lanthanum trifluoride) and MgF 2 (that is, magnesium fluoride) as a coating material for multilayer films. In addition, the film layer in contact with the substrate and the outermost film layer in the multilayer film are both LaF 3 film layer, and the substrate is a fused silica substrate.
[0047] In this embodiment, a first-order periodic multilayer film is preferably used to construct the basic film system. In the design of optical thin films, the bandwidth is generally adjusted by adjusting the thickness ratio of high and low refractive index materials. Since ...
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