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Detection method and device of surface shape of optical aspheric surface

A detection method and detection device technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of complex manufacturing and poor versatility, and achieve the effect of simple structure, strong versatility, and high measurement accuracy

Active Publication Date: 2017-08-18
XIAN TECHNOLOGICAL UNIV
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Problems solved by technology

However, this method requires a compensation device (compensation lens or computational holographic compensation element), which is very complicated to manufacture, and a compensator is only suitable for the detection of a certain type of aspheric surface, which has poor versatility

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  • Detection method and device of surface shape of optical aspheric surface
  • Detection method and device of surface shape of optical aspheric surface
  • Detection method and device of surface shape of optical aspheric surface

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Embodiment Construction

[0028] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0029] An embodiment of the present invention provides a method for detecting the shape of an optical aspheric surface. The method includes: after the reverse compensation fringes are irradiated from the projection direction onto the measured aspheric surface, the measured aspheric surface is reflected and imaged by the imaging system to obtain the The modulation fringes of the aspheric surface shape information, the surface shape deviation of the aspheric surface is obtained according to the modulation fringes, and the processing condition of the measured aspheric surface is determined according to...

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Abstract

The present invention discloses a detection method of the surface shape of an optical aspheric surface. The method includes the following steps that: reverse compensation fringes irradiate on a tested aspheric surface from a projection direction; the reverse compensation fringes are subjected to the reflection imaging of the tested aspheric surface; an imaging system obtains modulation fringes carrying the surface shape information of the tested aspheric surface; the surface shape deviation of the aspheric surface is obtained according to the modulation fringes; and the processing condition of the tested aspheric surface is determined according to the surface shape deviation. The invention discloses a detection device of the surface shape of a rotation symmetric optical aspheric surface.

Description

technical field [0001] The invention belongs to the technical field of detecting the surface shape of an optical element, and in particular relates to a method and a device for detecting the surface shape of an optical aspheric surface. Background technique [0002] Optical aspheric surface has many excellent optical properties, so it is more and more used in various optical and photoelectric systems; however, due to the different radii of curvature of each point on the aspheric surface, it is impossible to use the traditional spherical surface measurement method to complete the measurement of the aspheric surface . Not only that, with the continuous improvement of the performance of optical / optoelectronic systems, the requirements for optical aspheric surfaces are getting higher and higher; not only the aspheric surfaces are required to have good surface shape accuracy, but also the requirements for asphericity are gradually increasing; Therefore, aspheric surface measurem...

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Application Information

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IPC IPC(8): G01B11/24G01B11/25
CPCG01B11/2433G01B11/2504G01B11/254
Inventor 田爱玲赵思伟王红军刘丙才朱学亮王春慧
Owner XIAN TECHNOLOGICAL UNIV
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