Detection method and device of surface shape of optical aspheric surface
A detection method and detection device technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of complex manufacturing and poor versatility, and achieve the effect of simple structure, strong versatility, and high measurement accuracy
Active Publication Date: 2017-08-18
XIAN TECHNOLOGICAL UNIV
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The present invention discloses a detection method of the surface shape of an optical aspheric surface. The method includes the following steps that: reverse compensation fringes irradiate on a tested aspheric surface from a projection direction; the reverse compensation fringes are subjected to the reflection imaging of the tested aspheric surface; an imaging system obtains modulation fringes carrying the surface shape information of the tested aspheric surface; the surface shape deviation of the aspheric surface is obtained according to the modulation fringes; and the processing condition of the tested aspheric surface is determined according to the surface shape deviation. The invention discloses a detection device of the surface shape of a rotation symmetric optical aspheric surface.
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