Optical phase put-off precision measurement method and system thereof
A precision measurement, optical phase technology, applied in the field of optical measurement, can solve the problems of low measurement accuracy, high installation and adjustment requirements, complex structure, etc.
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[0056] Specific embodiments of the present invention will now be described in conjunction with the accompanying drawings. The device used in Figure 3 is: the laser L can be a He-Ne laser with a wavelength of 632.8nm and a power of 2mw. Polarizer P and analyzer A can use extinction ratio of 10 5 , Glan-Taylor polarizing prism with aperture>10mm. The optical modulator E can use the KD*P crystal longitudinal modulation method as the modulator. The modulation signal is a sinusoidal voltage, the voltage adjustment range is: 600-2000V, and the modulation frequency is: 2kHz. The Soleil compensator C can be made of quartz material, the working wavelength range is 200-2000nm, the horizontal movement range of the optical wedge is 0-30mm, the movement accuracy is 1μm, and the optical aperture is above 10mm. The light detector D can use a photodiode for photoelectric conversion and detection. A matching signal processing circuit is designed according to the modulation frequency, and t...
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