The invention provides a method and a
system for exciting an MEMS
resonance module, the provided MEMS
resonance module at least has a high-frequency mode and a low-frequency mode which are designed according to a target frequency integer ratio, a parametric
excitation signal is applied to the MEMS
resonance module to excite the low-frequency mode, the parametric
excitation signal is a frequency
signal with continuously changing frequency, and the frequency of the parametric
excitation signal changes continuously. The eigenfrequency of the parameterized excitation
signal is obtained, the eigenfrequency is the frequency of the parameterized excitation
signal when the ratio of the first actual
measurement frequency of the high-frequency mode to the second actual
measurement frequency of the low-frequency mode is the target frequency integer ratio, the first actual
measurement frequency is the frequency of the low-frequency mode in the excitation process of the parameterized excitation signal, and the second actual measurement frequency is the frequency of the parameterized excitation signal in the excitation process of the low-frequency mode. The second actual measurement frequency is the frequency of the high-frequency mode in the excitation process of the parameterized excitation signal, a target excitation signal is applied to the MEMS resonance module, and the frequency of the target excitation signal is the eigenfrequency, so that the
energy transfer efficiency between different
modes of the MEMS resonance module is improved, and the sensitivity of the MEMS resonance module is improved by integer multiples.