Heat treatment method of glass substrate
A heat treatment method and glass substrate technology, applied in the field of heat treatment, can solve problems such as increase and inability to ensure electrical characteristics, and achieve the effect of suppressing strain
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[0070] When a low-friction sheet is placed on the upper surface of the support member and heat treatment is performed with the glass substrate placed on the upper surface of the low-friction sheet (hereinafter also referred to as "Example") and when the support member In the case where the heat treatment was performed with the glass substrate directly placed on the upper surface of the glass substrate (hereinafter also referred to as "Comparative Example 1 and Comparative Example 2"), the strain in the plane direction of the glass substrate was confirmed before and after the heat treatment. Confirmation test.
[0071] In carrying out the confirmation test, four sets of support member / low-friction sheet / glass substrate were prepared in Examples, and four sets of support member / glass substrate were prepared in Comparative Examples 1 and 2. Furthermore, heat treatment was performed on each component.
[0072] The glass substrate to be heat-treated was commonly used in Examples, ...
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