Procedure sequence control method and apparatus

A technology of process sequence and control method, applied in the direction of program control, computer control, general control system, etc., can solve the problems of long waiting time, reduced experimental efficiency, and delayed experimental progress, so as to shorten the waiting time and ensure the processing progress. , the effect of improving experimental efficiency

Active Publication Date: 2017-11-21
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Problems solved by technology

[0004] However, the process processing time in actual production often takes several hours or longer. For the experimental process that needs to be processed urgently, if the hardware equipment required to process the experimental process is being used by the production process currently processed by the production line equipment, the commonly used The processing method requires a lot of waiting time, resulting in a delay in the progress of the experiment and a reduction in the efficiency of the experiment

Method used

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  • Procedure sequence control method and apparatus
  • Procedure sequence control method and apparatus
  • Procedure sequence control method and apparatus

Examples

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example 1

[0093] refer to image 3 , shows a schematic structural diagram of an example of an embodiment of the present invention applied to a silicon wafer etching machine. Depend on image 3 It can be seen that the silicon wafer etching machine includes a plurality of processing equipment, mainly including:

[0094] 3 silicon wafers loaded in the container (Load Port): each silicon wafer loaded in the container includes multiple container slots, and each container slot can hold a single silicon wafer;

[0095] 1 atmospheric manipulator (ATM Robot): the device responsible for transferring silicon wafers from the Load Port and Load Lock;

[0096] 2 wafer cache chambers (Load Lock): the device responsible for caching the silicon wafers transferred from the Load Port, of which the 2 Load Locks are parallel devices that can cache the built-in silicon wafers at the same time;

[0097] 1 vacuum robot (VAC Robt): the device responsible for transferring silicon wafers from the Load Lock and...

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Abstract

The invention discloses a procedure sequence control method and apparatus. The method includes the steps of setting an attribute level of an execution attribute for a second procedure to be subjected to queue jumping processing; comparing an attribute level of an execution attribute of a currently processed first procedure with the attribute level of the execution attribute of the second procedure to be subjected to the queue jumping processing; if the attribute level of the second procedure is higher than the attribute level of the first procedure, further determining whether a second processing device required by the second procedure to be subjected to queue jumping processing is used by the currently processed first procedure; and if so, releasing a target processing device required for the second procedure from a first processing device for the use in the second procedure. The invention realizes the queue jumping processing for the second procedure which is urgently needed to be processed, overcomes the defect of a conventional method that the first processing device currently used for the first procedure cannot be used for processing the second procedure which is urgently needed to be processed until the currently processed first procedure is finished, and ensures processing progress of the second procedure which is urgently needed to be processed.

Description

technical field [0001] The invention relates to the technical field of process control, in particular to a process sequence control method and a process sequence control device. Background technique [0002] For the production line equipment used in the production line, the equipment control system and the hardware equipment are generally jointly controlled and operated. After receiving the operator's instruction, the equipment control system controls the hardware equipment to complete the process according to the instruction content and obtain the product. In actual production, when there are multiple processes to be processed, the production line equipment will complete the processing of multiple processes according to the sequence of processes received by the equipment control system. [0003] At present, production line equipment usually processes multiple processes sequentially according to the order of received processes. When using production line equipment to conduc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/042
CPCG05B19/042
Inventor 刘振华
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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