Surface-modified titanium dioxide thin film gas sensor and preparation method thereof
A gas sensor and surface modification technology, applied in the direction of instruments, scientific instruments, measuring devices, etc., to achieve the effects of low production cost, improved gas sensitivity performance, and simple process operation
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Embodiment 1
[0032] Firstly, a pure titanium circular foil with a diameter of 1.5cm and a thickness of 1mm is cut by wire, and the purity of titanium is above 99.96wt.%. Then sand it with 0# to 5# sandpaper in turn, remove oil stains and dust with acetone and deionized water and dry it. A Ti metal film with a thickness of 30 nm was deposited on the surface of the titanium foil by radio frequency magnetron sputtering. The sputtering process was a Ti target sputtering power of 100 W for 15 minutes. The titanium foil obtained above is placed in a porcelain boat, put into a tube furnace and thermally oxidized in an air atmosphere, with an air flow rate of 200 sccm, a heating rate of 10°C / min, and thermal oxidation at 1000°C for 1-3 hours. Subsequently, the Ti surface-modified TiO was prepared by cooling to room temperature with the furnace 2 Micro-nano thin film, the shape is as figure 2 shown. The prepared surface-modified TiO 2 The micro-nano film was annealed at 500°C for half an hour,...
Embodiment 2
[0034] Firstly, a pure titanium circular foil with a diameter of 1.5cm and a thickness of 1mm is cut by wire, and the purity of titanium is above 99.96wt.%. Then sand it with 0# to 5# sandpaper in turn, remove oil stains and dust with acetone and deionized water and dry it. A Ni metal film with a thickness of 30 nm was deposited on the surface of the titanium foil by radio frequency magnetron sputtering, the sputtering process was Ni target sputtering power 150W, and the time was 690 seconds. The titanium foil obtained above is placed in a porcelain boat, put into a tube furnace and thermally oxidized in an air atmosphere, with an air flow rate of 200 sccm, a heating rate of 10°C / min, and thermal oxidation at 1000°C for 1-3 hours. Subsequently, Ni surface-modified TiO was prepared by cooling to room temperature with the furnace 2 Micro-nano thin film, the shape is as image 3 shown. The prepared surface-modified TiO 2 The micro-nano film was annealed at 500°C for half an h...
Embodiment 3
[0036] Firstly, a pure titanium circular foil with a diameter of 1.5cm and a thickness of 1mm is cut by wire, and the purity of titanium is above 99.96wt.%. Then sand it with 0# to 5# sandpaper in turn, remove oil stains and dust with acetone and deionized water and dry it. The Ag metal film with a thickness of 30nm was deposited on the surface of titanium foil by radio frequency magnetron sputtering, the sputtering process was Ag target sputtering power 50W, and the time was 270 seconds. The titanium foil obtained above is placed in a porcelain boat, put into a tube furnace and thermally oxidized in an air atmosphere, with an air flow rate of 200 sccm, a heating rate of 10°C / min, and thermal oxidation at 1000°C for 1-3 hours. Subsequently, Ag surface-modified TiO was prepared by cooling down to room temperature in the furnace. 2 Micro-nano thin film, the shape is as Figure 4 shown. The prepared surface-modified TiO2 The micro-nano film was annealed at 500°C for half an ho...
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