Centrifugal triaxial angular rate sensor based on detection of moire fringes

A rate sensor and Moiré fringe technology, which is applied in the directions of instruments, measuring devices, surveying and navigation, etc., can solve the problem that the angular rate sensor has not been reported, and achieve the effect of easy single-chip integration, high precision and long life.

Pending Publication Date: 2017-12-12
ZHONGBEI UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

At present, Moiré fringes have been widely used in the fields of precision displacement measurement, automatic positioning, tracking test and optical information processing, but have not been reported in angular rate sensors.

Method used

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  • Centrifugal triaxial angular rate sensor based on detection of moire fringes
  • Centrifugal triaxial angular rate sensor based on detection of moire fringes
  • Centrifugal triaxial angular rate sensor based on detection of moire fringes

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Embodiment Construction

[0034] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0035] In describing the present invention, it is to be understood that the terms "centre", "central", "upper", "lower", "front", "rear", "left", "right" etc. indicate an orientation or position The relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred combination or element must have a specific orientation, be constructed and operated in a specific o...

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Abstract

The invention relates to a centrifugal triaxial angular rate sensor based on the detection of moire fringes. The centrifugal triaxial angular rate sensor mainly and structurally comprises an upper substrate, a fixed grating layer, a sensing mechanism and a lower substrate, wherein the upper substrate is provided with four photoelectric detection arrays, the sensing mechanism comprises a supporting framework, a detection beam, a connection beam, a mass block and a movable grating, the fixed grating layer is provided with four fixed gratings, the lower substrate is provided with four laser sources, and the mass block is provided with the movable grating. By adopting the structure, no driving circuit is needed; the mass block is driven to produce micro displacement by adopting a centrifugal force, and the micro displacement is detected by adopting optical moire fringes; the centrifugal triaxial angular rate sensor is reasonable and compact in structure, convenient in detection, high in detection accuracy, high in sensitivity, and high in resolution ratio, has no problem such as orthogonal errors, offset output and the like; and the measurement accuracy can be improved by one grade compared with the prior art, the detection data is complete and accurate, and the reliability is good.

Description

technical field [0001] The invention relates to a centrifugal three-axis angular rate sensor based on Moiré fringe detection, and belongs to the related field of micro-inertial navigation technology. Background technique [0002] Micromechanical angular rate sensor is a high-tech developed in the early 1980s for both military and civilian purposes. Compared with traditional angular rate sensors, it has small size, low power consumption, low cost, easy mass production, and high sensitivity. , strong anti-overload capability, large dynamic range and good integrability, etc., can be embedded in electronics, information and intelligent control systems, so that the system volume and cost are greatly reduced, and the overall performance is greatly improved, which is in line with the development direction of product information. In addition, with With the continuous improvement of MEMS technology, the monolithic integrated three-axis angular rate sensor that measures the full spati...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/574
CPCG01C19/574G01C19/58
Inventor 李孟委梁洲鑫耿浩李秀源吴倩楠
Owner ZHONGBEI UNIV
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