Inspection apparatus

A technology of inspection device and mobile device, which is applied to measurement devices, transportation and packaging, and exploration of nuclear radiation, etc., can solve the problems of baffle structure, complicated control, large baffle size, and speed reduction, and shorten the inspection time. , The effect of preventing radiation leakage

Active Publication Date: 2017-12-19
ORMON CORPORATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0009] However, as in the inspection device described in Patent Document 3, when a plurality of shielding baffles are provided, the structure and control of the baffles become complicated and the cost of the dev

Method used

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  • Inspection apparatus
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Example

[0062] (First embodiment)

[0063]

[0064] First, refer to figure 1 with figure 2 The structure of the X-ray inspection apparatus of this embodiment will be described. figure 1 Is a cross-sectional view schematically showing the X-ray inspection apparatus 1 of this embodiment, figure 2 It is a block diagram showing the structure and functions of the X-ray inspection apparatus 1. Such as figure 1 with figure 2 As shown, the X-ray inspection apparatus 1 has a carry-in preparation unit 10, an imaging unit 20, and a carry-out preparation unit 30.

[0065] In addition, figure 1 It is a diagram schematically showing the flow of the substrate during inspection. Refer to image 3 The X-ray shielding device will be described.

[0066] Such as figure 1 As shown, the main body of the X-ray inspection apparatus 1 is provided with an imaging unit 20 for X-ray imaging, and on the upstream side (the left side of the figure) of the imaging unit 20, a loading preparation unit for loading the subs...

Example

[0121] (Second embodiment)

[0122] In the first embodiment, the transport mechanism 203 is spread all over the imaging room 200, and the substrate placed on the transport mechanism 203 is moved. In this regard, the second embodiment is an embodiment in which the substrate is moved by moving the transport mechanism 203 itself. Figure 8 It is a cross-sectional view schematically showing the X-ray inspection apparatus 1 of the second embodiment.

[0123] As shown in the figure, in this embodiment, the transport mechanism 203 can move along the X axis direction in the figure.

[0124] In the second embodiment, before starting the process of step S21, the transport mechanism 203 is moved to a position capable of receiving a substrate. In addition, before starting the process of step S25, the transport mechanism 203 is moved to a position where the substrate can be discharged. In addition, after step S27 is completed, while the conveyance mechanism 203 is moved to a position where the ...

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Abstract

The present invention provides an inspection apparatus using radiation, which prevents radiation leakage and shortens the inspection time. An inspection apparatus includes a feed-in preparation chamber, an imaging chamber, and a feed-out preparation chamber. Each preparation chamber includes a feed-in unit that receives an inspection object through a first opening, a traverser that translates the received object to a second opening in a direction different from the receiving direction of the object, and a feed-out unit that moves the object in a direction different from a moving direction of the traverser and discharges the object through the second opening. The imaging chamber includes an imaging unit that images the object fed from the feed-in preparation chamber. The traverser includes a mount for the object, and a shield that moves together with the mount and prevents radioactive rays entering one of the first and second openings and propagating in the moving direction of the traverser from reaching the other opening.

Description

technical field [0001] The present invention relates to an inspection device using radiation. Background technique [0002] There is known a technique of non-destructively inspecting an inspection object using image information obtained by X-ray imaging. For example, Patent Document 1 discloses a method of reconstructing 3D data of board-mounted components by X-ray CT (computer tomography: computer tomography), and inspecting the quality of soldering based on the 3D data. This type of X-ray inspection device can perform high-precision inspection of the internal structure and fine structure of the inspection object, so it has begun to be used in automatic inspection of various industrial product production lines. [0003] Inspection devices used on an inline (Inline) are required to shorten the inspection cycle time as much as possible in order to prevent stagnation in the inspection process. Therefore, as shown in Patent Document 2, the following structure is known: two co...

Claims

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Application Information

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IPC IPC(8): G01N23/04
CPCG01N23/04G01N2223/3308G01V5/0016B65G15/00G01N23/046G01N2223/3307G01N2223/419G01N2223/643G01N2223/646G21K1/04
Inventor 杉田信治大西贵子太田佳秀
Owner ORMON CORPORATION
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