Methods, systems and devices related to distortion correction in imaging devices

Abstract

Disclosed herein are apparatuses, systems, and methods related to distortion-corrected imaging for acquiring image-related data of a substrate, the apparatuses, systems, and methods comprising: a beam emitter for directing the emission toward the substrate and a signal detector for determining a signal strength value associated with said emission; wherein said signal strength value is associated with a corrected substrate position, said corrected substrate position being determined from the expected substrate position and a correction factor that is a function of the expected substrate position.

Description

technical field [0001] The present invention relates to a scanning imaging system and device, in particular to a method, system and device related to distortion correction of scanning images. Background technique [0002] Scanning imaging devices provide an exemplary illustration of image distortion problems, and they cover a broad range of systems that may have similar problems. This problem can lead to image distortion caused by errors related to the difference between the ideal position and the actual position where the image was captured during scanning. Many scanning and non-scanning imaging devices may be affected and may include electron beam systems, focused ion beam systems, laser imaging systems, scanning electron microscopes (SEM), transmission electron microscopes (TEM), and optical systems. The scanning system is characterized by scanning the image capture mechanism over the target substrate, and image data acquisition occurs during such scanning. Non-scanning...

AI Technical Summary

Problems solved by technology

Due to the number of sources of error, the interactions between them in any case and the complexity of interpreting all these errors in determining the actual position of sample measurements of different measurements at different times, and the complexity of interpreting these errors in generating images, in any case, In any case, especially at higher resolutions and / or for larger areas, has been difficult

In addition, image distortion introduces additional uncertainty when stitching such images to form a larger image, or aligning such stitched or other forms of images vertically (i.e., 3-D models)

[0005] Another source of error for scanning image data collectors can be caused by differences in the relative size of the substrate capture area relative to the corresponding image area, and inconsistencies in these differences across the substrate

This can cause, for example, changes in the travel rate of the scanning infrastructure relative to the sampling rate

Likewise, a sample taken at a first location may correspond to a particular region of the surface or cross-section, and that sample may then be used to generate image data corresponding to pixels at that location, but due to the Differences in the above errors at different locations on the substrate, which may differ at another location

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