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X-ray source for ionising of gases

An X-ray and ionization technology, applied in the field of X-ray sources, can solve the problems of difficult integration, time-consuming, expensive control electronic devices, etc.

Active Publication Date: 2018-01-02
ESTION TECH GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This means that the x-ray tube must be replaced every year, which is time consuming and expensive
[0024] The additional disadvantage of these systems is that they are very large and thus often difficult to integrate in installations, and moreover, they contain relatively expensive control electronics and require monitoring of the incandescent cathode

Method used

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  • X-ray source for ionising of gases
  • X-ray source for ionising of gases
  • X-ray source for ionising of gases

Examples

Experimental program
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Embodiment Construction

[0049] exist figure 1 In , a miniaturized low-energy X-ray source is shown having a field emission tip array 1 mounted on an electrode 6 above an insulating body 5 or on said insulating body. The electrical and mechanical connection between the field emission tip array 1 and the electrode 6 (cathode) is performed by chip bonding or with the help of a conductive adhesive. The insulating body 5 is introduced flush and vacuum-tight into the metal carrier 4 or is arranged on said carrier, with the electrodes 6 penetrating through the insulating body 5 . The electrodes 6 are supplied with the necessary cathodic voltage from a suitable high voltage source.

[0050] The field emission tip array 1 consists of a cuboidal base 18 made of metal or semiconductor material from which a plurality of emitting tips arranged in an array and regularly spaced from each other protrude vertically. The emission tip can be designed in the shape of a cone or a rod and can have a rounded head. Such ...

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PUM

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Abstract

The invention relates to an X-ray source for ionising of gases, with a field emission peaks array in a vacuum chamber. The invention provides a device for ionising of gases, which combines the simple,compact and cost-effective design and arrangement of bar-shaped high-voltage ionisers with the advantages of low-energy X-ray ionisers. A field emission peaks array (1) is arranged inside a vacuum region (3b), which is surrounded by a hood (3) and a part of a carrier plate (4), wherein the field emission peaks array (4) is arranged electrically isolated with respect to the carrier plate (4) and wired as a cathode connected to a high-voltage source and wherein a transmission window (2) which is transparent to X-ray radiation is arranged in the hood (3) centrally above the field emission peak array (1) and wherein the hood (3) is wired as an anode.

Description

technical field [0001] The present invention relates to an X-ray source for ionizing gases with an array of field emission tips in a vacuum chamber. Background technique [0002] Such an X-ray source for ionizing gases consists of a plurality of individual X-ray sources arranged longitudinally in a row with a rod-shaped carrier and supplied with the required voltage. Here the x-ray sources are installed in the air flow in such a way that they ionize the surrounding air arranged in a rod-like manner. Air that has been ionized in this way can be used to neutralize electrostatic charges in critical manufacturing areas. [0003] For example, in clean rooms of manufacturing installations in the microelectronics industry, such an X-ray source may be inserted in a generally vertical air stream to neutralize electrostatic charges on objects with ionized gas. This neutralization is necessary because electrostatic charges lead to increased particle settling. On the other hand, unco...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J35/06H01J35/18H05H1/48
CPCH01J35/18H01J35/186H01J35/065H05H1/471H01J35/064H01J2235/18H01J37/32
Inventor T·泽巴尔德
Owner ESTION TECH GMBH