Floating connection device and maintenance tool facilitating mounting and dismounting of same
A technology of floating connection and tooling, which is applied in the direction of manufacturing tools, metal material coating technology, ion implantation plating, etc., can solve the problems of inconvenient overall movement of tooling, complex structure of tooling, inconvenient disassembly and assembly, etc., to achieve simple structure, The effect of supporting flexibility and avoiding damage
Inactive Publication Date: 2018-01-16
紫石能源有限公司
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Problems solved by technology
The former scheme is inconvenient to disassemble and assemble, while the latter scheme has a complex structure and cumbersome operation, which is not convenient for the overall movement of the tooling
Method used
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[0057] Embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but should not be used to limit the scope of the present invention.
[0058] In the description of the present invention, unless otherwise stated, the meaning of "plurality" is two or more; the terms "upper", "lower", "left", "right", "inner", "outer" , "Top", "Bottom", "Head", "Tail", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than Nothing indicating or implying that a referenced device or element must have a particular orientation, be constructed, and operate in a particular orientation should therefore not be construed as limiting the invention. In addition, the terms...
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The invention relates to maintenance tools in the field of vacuum coating, especially to a floating connection device and a maintenance tool facilitating the mounting and dismounting of the floating connection device. The floating connection device comprises an upper cover and a heating plate horizontally hung below the upper cover, wherein the cross section size of the heating plate is smaller than the cross section size of the upper cover. The floating connection device is characterized in that the upper cover is separated from the heating plate, and the heating plate is connected with the upper cover through a plurality of floating connection structures. The maintenance tool comprises a tool body, a fixed module and an elevating module, wherein the fixed module is arranged on the top ofthe tool body; the elevating module comprises a pedestal and a lifting bar; the pedestal is arranged on the top of the fixed module; and the lifting bar is arranged in the pedestal in a liftable way.The floating connection device prevents thermal expansion deformation of the heating plate in a technical process from influencing the upper cover, so damage to the upper cover caused by thermal deformation of the heating plate is avoided. The maintenance tool is simple in structure and facilitates mounting and dismounting of the floating connection device; and the maintenance tool is convenientto move, so cost for manual transfer of the maintenance tool is saved.
Description
technical field [0001] The invention relates to a maintenance tool in the field of vacuum coating, in particular to a floating connection device and a maintenance tool for easy disassembly and assembly of the floating connection device. Background technique [0002] In the existing coating equipment, the upper cover of the process chamber is in direct contact with the heating plate, and the thermal expansion and deformation of the heating plate will affect the upper cover when the coating is heated, and will cause deformation or damage of the upper cover in severe cases. [0003] In the prior art, the upper cover and the heating plate of the process chamber are usually disassembled by using the maintenance tooling structure. In order to facilitate the disassembly and assembly between the upper cover and the heating plate, most of the existing maintenance tooling structures are an integral platform. After the workpiece is clamped, disassemble the internal small parts; or fix ...
Claims
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Inventor 邓曾红
Owner 紫石能源有限公司