A stacked two-color infrared focal plane detector and its preparation method

An infrared focal plane and detector technology, used in semiconductor devices, final product manufacturing, sustainable manufacturing/processing, etc., can solve the problems of incomplete absorption of incident infrared light, limited channel growth thickness, etc., to achieve easy DBR fabrication, The effect of improving photoelectric absorption efficiency and improving device performance index
CN107706261BActive Publication Date: 2019-10-08中航凯迈上海红外科技有限公司
5 Cites 1 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
中航凯迈上海红外科技有限公司
Publication Date
2019-10-08

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
Patent Text Reader

Abstract

The invention relates to a laminated two-color infrared focal plane detector and a preparation method thereof and belongs to the technical field of semiconductor photoelectronic devices. A distributedBragg reflector structure is introduced into a laminated InAs / GaSb two-color superlattice structure photosensitive chip; and infrared light, which is not completely absorbed, of laminated two-color photosensitive absorption regions is reflected separately, so that the infrared light returns to the absorption regions again. Reflector layers are adopted by two channels of the laminated two-color infrared detector, so that the photoelectric absorption efficiency of the corresponding channel of the chip is improved and the target of improving the performance index of the device is achieved, and meanwhile, the difficulty in epitaxial growth of a first channel epitaxy structure layer and a second channel epitaxy structure layer is correspondingly reduced.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention relates to a laminated two-color infrared focal plane detector and a preparation method thereof, belonging to the technical field of semiconductor optoelectronic devices. Background technique

[0002] With the advancement of infrared technology, the demand for stacked two-color infrared detection devices is increasing. The use of laminated two-color infrared detectors, compared with the use of separate detectors or side-by-side mosaic infrared detectors, the infrared system has significant advantages in the simultaneous acquisition of target information and the same spatial position. The detector can make the prepared infrared system have the characteristics of compact structure, low power consumption and easy realization of optical common-aperture detection. For a typical stacked two-color infrared detector photosensitive chip structure, the InAs / GaSb type II superlattice structure is a chip structure that has received extensive attenti...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More