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Mask assembly and evaporation device

A technology for masks and components, applied in vacuum evaporation plating, sputtering, electrical components, etc., can solve the problem of high cost of masks and achieve high efficiency

Active Publication Date: 2018-02-27
WUHAN TIANMA MICRO ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In the prior art, compared with the existing masks with regular-shaped evaporation regions, when making irregular-shaped display panels, the evaporation regions of the masks used in the evaporation process also need to be irregular-shaped evaporation regions. The cost of the mask plate is higher

Method used

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  • Mask assembly and evaporation device
  • Mask assembly and evaporation device
  • Mask assembly and evaporation device

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Embodiment Construction

[0071] In order to manufacture special-shaped display panels and improve the production efficiency of special-shaped display panels, embodiments of the present invention provide a mask assembly and an evaporation device. In order to make the purpose, technical solution and advantages of the present invention clearer, the following examples are given to further describe the present invention in detail.

[0072] Please refer to Figure 1 to Figure 3 , in the prior art, the structure of the mask assembly usually includes a frame 01 and a first strip plate 02 and a second strip plate 03 fixed on the frame 01, the first strip plate 02 and the second strip plate 03 extend along the first direction and the second direction respectively, specifically, the first direction intersects the second direction. Such as figure 2 and image 3 As shown, the first strip plate 02 and the second strip plate 03 are both cubic strip structures, therefore, the vapor deposition area 04 formed by th...

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Abstract

The invention discloses a mask assembly and an evaporation device which are used for manufacturing special-shaped display panels, improving the manufacturing efficiency of the special-shaped display panels and reducing the cost. The mask assembly provided by the embodiment of the invention comprises a frame and a first strip-shaped plate; the first strip-shaped plate is fixed to the frame and extends in a first direction, wherein the first strip-shaped plate comprises a first zone and a second zone; and the width of the first zone is larger than that of the second zone in the direction which is parallel to the surface of the first strip-shaped plate and perpendicular to the first direction.

Description

technical field [0001] The invention relates to the technical field of OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode) display device fabrication, in particular to a mask assembly and an evaporation device. Background technique [0002] OLED display panels are thin, light, wide viewing angle, active light emission, continuously adjustable light color, low cost, fast response, low energy consumption, low driving voltage, wide operating temperature range, simple production process, high luminous efficiency and With many advantages such as flexible display, it has been listed as a very promising next-generation display technology. [0003] When manufacturing OLED display panels, many layer structures need to be produced by evaporation process. During the evaporation process, it is necessary to use an evaporation mask as an evaporation mask to form an evaporation pattern on the evaporation target. With the development of OLED technology, display devices are gr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24H10K99/00
CPCC23C14/042C23C14/24H10K71/166C23C14/12H10K71/00
Inventor 穆乃超李元辛宇马骏韩立静
Owner WUHAN TIANMA MICRO ELECTRONICS CO LTD