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Acoustic wave sensor

An acoustic wave sensor, acoustic wave technology, applied in the direction of sensors, sensor types, instruments, etc., can solve problems such as low sensitivity

Pending Publication Date: 2018-03-06
INFINEON TECH AG
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] Although piezoelectric acoustic sensors are available with a simpler structure compared to capacitive acoustic sensors, they have lower sensitivity compared to capacitive acoustic sensors

Method used

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Embodiment Construction

[0020] The following detailed description refers to the accompanying drawings, which show by way of example specific details and embodiments of the invention.

[0021] The concept "exemplary" used herein means "serving as an example or for illustration". Any embodiment or design described herein as illustrative is not necessarily to be construed as preferred or advantageous over other embodiments or designs.

[0022] figure 1 A schematic top view of the acoustic wave sensor 100 is shown. figure 2 shows the basis figure 1 The acoustic wave sensor 100 shown in the figure 1 Sectional view of midline II-II.

[0023] The acoustic wave sensor 100 may have a continuous diaphragm 102 deflectable or deformable by the sound waves to be detected and a piezoelectric layer 104 provided on the diaphragm 102 with a plurality of piezoelectric layer sections 104a, 104b, These piezoelectric layer segments are each equipped with at least two respective electrical contact structures 105a, 1...

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Abstract

An acoustic wave sensor may include: a continuous membrane deflectable by acoustic waves to be detected, and a piezoelectric layer provided on the membrane and including a plurality of piezoelectric layer portions respectively equipped with at least two individual electric contact structures configured to electrically connect the respective piezoelectric layer portions. Electric contact structuresassociated with different piezoelectric layer portions may be separated from each other.

Description

technical field [0001] Various embodiments generally relate to an acoustic wave sensor and a method of manufacturing an acoustic wave sensor. Background technique [0002] Acoustic sensors are becoming very important today, either as part of speech transmission devices or as part of photoacoustic sensors in gas analyzers for analyzing gases, for example ambient air. [0003] Commonly used acoustic sensors are designed as capacitive sensors with two diaphragms which are spaced apart from each other and define a capacitor. One of the diaphragms is fixed and the other is displaceable by the sound waves to be detected. The displacement of the movable diaphragm determines the capacitance change of the capacitor, which can be detected by a suitable readout circuit and output as an electrical signal from which properties of the sound wave to be detected, such as the sound pressure, can be deduced. [0004] Although the capacitive acoustic wave sensor is characterized by high sens...

Claims

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Application Information

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IPC IPC(8): G01H11/08
CPCG01H11/08H04R17/025H04R31/00H10N30/506
Inventor A·德厄M·多夫梅斯特U·施密德M·施奈德
Owner INFINEON TECH AG