Air bath control device

A technology of control devices and air baths, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems that it is difficult to ensure the uniformity and stability of the temperature and pressure of the interferometer pipeline, so as to ensure the pressure stability and uniformity Sex, solve the effect of oversize and ultra-thin structure

Active Publication Date: 2018-03-13
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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AI Technical Summary

Problems solved by technology

Since the above-mentioned traditional air bath control device cannot cover the entire optical path of the interferometer under the objective lens, it is difficult to ensure the uniformity and stability of the temperature and pressure of the interferometer pipeline

Method used

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Embodiment 1

[0025] figure 2 It is a schematic diagram of the air bath control device provided by the present invention, and the air bath control device includes a pressure homogenization unit, which is used to decompress the input gas to form a uniform pressure gas; a gas release unit, which includes a plurality of gas bath air outlets, for The uniform pressure gas is released through the air outlet of the air bath.

[0026] see image 3 , is the superstructure of the air bath control device, that is, the air pressure homogenization unit. In this embodiment, the air pressure uniform unit includes a main pipeline 300, a plurality of partial pressure pipelines 302, a plurality of first connection pipelines 303 and a plurality of first through pipelines 301; the main pipeline 300 is connected to an externally provided air supply gas source, the partial pressure pipe 302 and the first through pipe 301 are respectively parallel to the main pipe 300, and the first connecting pipe 303 communi...

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Abstract

The invention provides an air bath control device which has a double-layer air bath structure that comprises an air pressure equalizing unit and an air releasing unit. The air pressure equalizing unitperforms pressure reduction on input air through a plurality of pipes for obtaining uniform-pressure air, and conveys the input gas to an edge through pipe. The air releasing unit comprises a plurality of air bath outlets, thereby releasing the uniform-pressure air through the air bath outlets, and forming thin-film air bath. The air bath control device provided by the invention has an ultrathinstructure and can be used in a compact space, thereby setting a problem of overlarge dimension of an existing air bath structure.

Description

technical field [0001] The invention relates to the technical field of precision mechanical instruments, in particular to an air bath control device. Background technique [0002] Traditional air bath control devices generally use normal pressure air supply. In order to ensure the pressure stability and uniformity of the air bath outlet, the end device of the air bath is often equipped with a static pressure chamber structure and a filter with a large pressure resistance to ensure that the entire air outlet surface Uniformity of wind speed, the outlet adopts grille or louver structure for air bath guidance. Such as figure 1 As shown, the traditional air bath terminal device includes an air bath static pressure chamber 101 , a filter 102 , and an air bath grill 103 . In order to stabilize the pressure difference between the outlet and inlet at the end of the air bath, it is necessary to ensure that the thickness of the static pressure chamber reaches a certain size (thickne...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02
CPCG01B9/02051
Inventor 刘连军
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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