Precise vibration isolation device applied to large vacuum environment simulator
A vacuum environment simulation and vibration isolation technology, applied in the direction of supporting machines, springs/shock absorbers, vibration suppression adjustment, etc., to achieve the effects of easy adjustment and maintenance, high-precision vibration isolation, and expanded load range
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[0021] The invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0022] Such as figure 1 As shown, the precision vibration isolation device includes an external vibration isolation device 1, a vibration isolator 2, a vibration isolation platform 3, an external device through a tank 4, a top vibration isolation object 5, a bottom vibration isolation object 6, and a vacuum environment simulator 7. The external vibration isolation device 1 is a metal structure or reinforced concrete structure, which can initially isolate the transmission of environmental vibration to the vibration isolation system; the vibration isolator 2 is a compressed air spring vibration isolator, which is installed on the vibration isolation foundation 1 and supports the outside of the tank The two ends of the device 4 are used to isolate the transmission of the residual environmental vibration to the vibration isolation platform 3 . The funda...
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