Fluid temperature fluctuation suppression device based on dynamic tracking thermal capacitance filtering

Abstract

The invention, which belongs to the technical field of precise temperature control, provides a fluid temperature fluctuation suppression device based on dynamic tracking thermal capacitance filtering.In order to solve a problem that the existing fluid temperature fluctuation suppression device can not meet a dynamic temperature control performance need, the invention provides a dynamic-tracking-based fluid temperature fluctuation suppression device. Fluid is divvied two parts flowing into passages at two sides of a thermal capacitance filtering device simultaneously; and fluid flows through one passage at one side directly. A temperature sensor obtains a fluid temperature set point changing situation; an electric control valve installed at an inlet of the passage at the other side is controlled to be turned on or off, so that one part of fluid is cut off and stored into the passage as a thermal capacitance filtering medium for temperature fluctuation suppression and consistency of themedium temperature and the fluid temperature set value is ensured. Therefore, following of the fluid temperature set value by the thermal capacitance filtering medium temperature is realized and thussuppression of the dynamic fluid temperature fluctuation is realized. An effective technical solution is provided for the fluid temperature control system having the dynamic high-precision temperature need.

Description

technical field [0001] The invention belongs to the technical field of precision temperature control, and mainly relates to a fluid temperature fluctuation suppression device based on dynamic tracking heat capacity filtering. Background technique [0002] With the continuous improvement of ultra-precision measurement and processing accuracy, thermal pollution has gradually become one of the key factors restricting the further improvement of measurement, processing accuracy and performance. At present, the circulating fluid temperature control system with air, water or composite coolant as the circulating medium is widely used to realize high-precision temperature control of temperature-sensitive parts and areas, and the fluid temperature fluctuation suppression device is connected in series with the circulating fluid temperature control system. The form in the system is used to further improve the fluid temperature stability, so as to realize the circulating fluid temperatur...

AI Technical Summary

Problems solved by technology

[0005] The above-mentioned types of technical solutions use different structures and heat capacity filter media to suppress the temperature fluctuation of the circulating fluid, but they all have the same common problem: they do not have the ability to suppress the dynamic temperature fluctuation following the change of the temperature set point of the circulating fluid, specifically :

[0007] (2) Also because water, metal balls or phase change materials do not have the ability to adjust their own temperature, factors such as heat dissipation will cause the temperature of media such as water, metal balls or phase change materials to gradually drift over time. Effectively suppress the temperature fluctuation of the circulating fluid, which will instead cause the temperature of the circulating fluid to drift with the temperature of the medium;

[0008] (3) If the temperature setting value of the circulating fluid is changed during the working process, there will be a phenomenon that the temperature of the circulating fluid does not match the temperature of the medium, that is, there is a temperature difference between the circulating fluid and the medium that exceeds the peak value of the temperature fluctuation of the circulating fluid itself, At this time, the medium not only cannot effectively suppress the temperature fluctuation of the circulating fluid, but also causes the temperature of the circulating fluid to deviate from the set point, which becomes a source of interference, and the temperature of the medium needs to be readjusted; and the phase change material only has a maximum temperature within the phase change temperature range. heat capacity, and the phase change temperature is usually a very narrow temperature range, so a phase change material can only suppress the temperature fluctuation of the circulating fluid whose temperature set point is within the phase change temperature range, when the circulating fluid temperature When the set value is other temperature, it is necessary to reconfigure the matching phase change material to achieve the effect of suppressing the temperature fluctuation of the circulating fluid

Therefore, when the existing technical solution of the circulating fluid temperature fluctuation suppression device is used in series with the constant temperature circulating chiller to form a circulating fluid temperature control system, although the temperature stability of the circulating fluid can be improved, the dynamics of the circulating fluid temperature control system are greatly limited. performance

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