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MEMS transducer for interacting with a volume flow of a fluid and method for producing same

A transducer and volume flow technology, applied in the field of manufacturing MEMS transducers and electroacoustic transducers, can solve problems such as low frequency disadvantage

Active Publication Date: 2018-04-17
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, for the sound pressure process, the dependence relation p∝f is obtained 3 , which is more unfavorable for low frequencies

Method used

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  • MEMS transducer for interacting with a volume flow of a fluid and method for producing same
  • MEMS transducer for interacting with a volume flow of a fluid and method for producing same
  • MEMS transducer for interacting with a volume flow of a fluid and method for producing same

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Embodiment Construction

[0064] Before the embodiments of the present invention are explained in detail below with reference to the drawings, it should be noted that in different drawings, identical, functionally identical, and operationally identical elements, objects and / or structures are provided The same reference numerals enable the description of these elements to be interchangeable and / or mutually applicable in different embodiments.

[0065] Reference is made below to MEMS transducers (MEMS=Micro Electro Mechanical Systems). MEMS transducers may include one or more electroactive components that cause changes in mechanical components based on an applied electrical quantity (current, voltage, charge, etc.). For example, such changes may involve deformation, heating or tensioning of mechanical components. Alternatively or additionally, mechanical influences on the component (such as deformation, heating or tension) may generate electrical signals or information (voltage, current, charge, etc.), ...

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Abstract

The invention relates to a MEMS transducer for interacting with a volume flow of a fluid, comprising a substrate having a cavity, and an electromechanical transducer which is connected to the substrate in the cavity and has an element which can be deformed along a lateral movement direction. A deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.

Description

technical field [0001] The invention relates to MEMS transducers, such as MEMS speakers, MEMS microphones or MEMS pumps, for interacting with a volume flow of a fluid. Furthermore, the invention relates to a method for manufacturing a MEMS transducer. Furthermore, the invention relates to MEMS-based electro-acoustic transducers. Background technique [0002] In addition to miniaturization, one focus of MEMS technology (MEMS: microelectromechanical systems) relates in particular to the potential for cost-effective manufacturability of medium- and high-volume components. Electroacoustic MEMS speakers are currently not significantly commercialized. With few exceptions, MEMS speakers consist of a membrane that deflects either quasi-statically or resonantly using selected physical operating principles. The deflection depends linearly or non-linearly on the applied electrical signal (current or voltage). This signal includes the time variation that is transmitted into the time...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H04R19/00B81C1/00
CPCH04R19/005B81B2201/0257B81B2203/051H04R1/023H04R1/08H04R9/02H04R15/00H04R17/00H04R23/002H04R2499/11H04R2201/003B81C1/00182B81B2203/0172B81B2201/054B81B3/0021B81B2201/032B81C1/00158B81B2201/036B81B2203/0109B81B2203/0118B81B2203/0127B81B2203/0136B81B2203/019B81C1/00142B81C1/0015
Inventor 哈拉尔德·琛克霍尔格·康拉德马蒂厄·高德特克劳斯·席曼茨塞尔久·兰达贝尔特·凯泽
Owner FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV
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