Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Device and method for surface shape measurement based on structured light illumination

A technology for structured light illumination and measuring devices, which is applied in measuring devices, optical devices, instruments, etc., can solve the problems that restrict the application of zoom surface shape measurement methods, and achieve simple installation and adjustment, improved detection efficiency, and fast axial scanning speed Effect

Active Publication Date: 2018-05-11
HARBIN INST OF TECH +1
View PDF12 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, affected by background noise, for samples with low reflectivity and large reflectivity differences, the conventional method will introduce large errors, which restricts the application of the zoom surface shape measurement method

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Device and method for surface shape measurement based on structured light illumination
  • Device and method for surface shape measurement based on structured light illumination
  • Device and method for surface shape measurement based on structured light illumination

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] Embodiment 1: as attached figure 1 The illustrated embodiment provides a surface shape measurement device based on structured light illumination, which is used to quickly switch axial positions to realize three-dimensional tomographic scanning.

[0040] A surface shape measurement device based on structured light illumination, comprising a structured light illumination module, an axial scanning module and a detection module;

[0041]The structured light illumination module is composed of two illumination optical paths, the first illumination optical path is as follows according to the direction of light propagation: laser device-1, conduction optical fiber-2, collimator mirror-3, amplitude type sinusoidal grating-4 and tube mirror- 5. The second illumination light path is as follows according to the direction of light propagation: laser 2 9, conduction fiber 2 10, collimator 2 11, amplitude type sinusoidal grating 2 12 and tube mirror 2 13;

[0042] According to the li...

Embodiment 2

[0052] Embodiment 2: as attached figure 1 and figure 2 The illustrated embodiment provides a surface shape measurement method based on structured light illumination, which is used to quickly switch axial positions to realize three-dimensional tomographic scanning.

[0053] A method for measuring surface shape based on structured light illumination, the method is implemented based on the surface shape measurement device based on structured light illumination described in Embodiment 1, and the specific steps are:

[0054] Step a, the laser 1 emits excitation light, and forms parallel light after passing through the conductive fiber 2 and the collimating mirror 3. The parallel light is modulated by the amplitude type sinusoidal grating 1 4 and then emitted by the tube mirror 1 5. At the same time, the laser 2 9 emits The excitation light forms parallel light after passing through the conductive optical fiber 2 10 and the collimating mirror 11. The parallel light is modulated by...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The present invention provides a device and a method for surface shape measurement based on structured light illumination, belonging to the technical field of optical microscopy imaging and measurement. The device is characterized in that: the device comprises a structured light illumination module, an axial scanning module and a detection module. A conventional structural light illumination microscopic system is added with an axial scanning device formed by polarization spectroscopes, low-aperture object lenses, tube lenses and a planar mirror so as to achieve high-speed axial movement of structural light illumination stripes in a space for samples in observation, windowed Fourier transform is employed to perform processing of images shot under different z-directional position stripe projections, the correlated coefficient of each sub area image at a projection strip frequency is calculated, each transverse position sharpness axial response curve is obtained, the peak of the curve isa relative height of the sample at the transverse position, and a surface shape of the sample is finally obtained. The device and the method for surface shape measurement based on the structured lightillumination are simple in mounting and regulation and fast in axial scanning speed, the influence of sample surface reflectivity difference on measurement result is small, a signal to noise ratio ishigh.

Description

technical field [0001] The present invention relates to a surface shape measurement device and method, in particular to a surface shape measurement device and method based on structured light illumination, which can realize high-speed axial scanning of structured light illumination stripes in the observed sample space, and reduce background noise The influence of the reflectance difference with the surface second of the sample on the measurement result belongs to the field of optical microscopic imaging and surface shape measurement. Background technique [0002] The zoom surface shape measurement method obtains the surface shape of the sample surface by judging the imaging clarity of the measured sample at different axial positions within the field of view of the imaging objective lens. The conventional zoom surface measurement method uses the stage to drive the sample to scan axially, and the scanning speed is slow and the efficiency is low. Moreover, conventional methods...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01B11/25
CPCG01B11/25
Inventor 刘辰光刘俭赵一轩陈刚李勇谭久彬
Owner HARBIN INST OF TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com