Device and method for surface shape measurement based on structured light illumination
A technology for structured light illumination and measuring devices, which is applied in measuring devices, optical devices, instruments, etc., can solve the problems that restrict the application of zoom surface shape measurement methods, and achieve simple installation and adjustment, improved detection efficiency, and fast axial scanning speed Effect
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Embodiment 1
[0039] Embodiment 1: as attached figure 1 The illustrated embodiment provides a surface shape measurement device based on structured light illumination, which is used to quickly switch axial positions to realize three-dimensional tomographic scanning.
[0040] A surface shape measurement device based on structured light illumination, comprising a structured light illumination module, an axial scanning module and a detection module;
[0041]The structured light illumination module is composed of two illumination optical paths, the first illumination optical path is as follows according to the direction of light propagation: laser device-1, conduction optical fiber-2, collimator mirror-3, amplitude type sinusoidal grating-4 and tube mirror- 5. The second illumination light path is as follows according to the direction of light propagation: laser 2 9, conduction fiber 2 10, collimator 2 11, amplitude type sinusoidal grating 2 12 and tube mirror 2 13;
[0042] According to the li...
Embodiment 2
[0052] Embodiment 2: as attached figure 1 and figure 2 The illustrated embodiment provides a surface shape measurement method based on structured light illumination, which is used to quickly switch axial positions to realize three-dimensional tomographic scanning.
[0053] A method for measuring surface shape based on structured light illumination, the method is implemented based on the surface shape measurement device based on structured light illumination described in Embodiment 1, and the specific steps are:
[0054] Step a, the laser 1 emits excitation light, and forms parallel light after passing through the conductive fiber 2 and the collimating mirror 3. The parallel light is modulated by the amplitude type sinusoidal grating 1 4 and then emitted by the tube mirror 1 5. At the same time, the laser 2 9 emits The excitation light forms parallel light after passing through the conductive optical fiber 2 10 and the collimating mirror 11. The parallel light is modulated by...
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