Nano-scale parallel measurement method and measurement device thereof
A parallel measurement, nano-scale technology, applied in measurement devices, mechanical measurement devices, and mechanical devices, etc., can solve the problems of difficulty in moving and relocating measurement equipment, inability to meet, and inability to meet the mass production of assembled products.
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[0022] refer to Figure 1 to Figure 2 The embodiments of the present invention will be further described.
[0023] First, ensure the horizontal adjustment of the foundation, the horizontal adjustment of the base of the equipment placed on the ground, the horizontal adjustment of the two ends of the shaft core 202 of the single oil floating bearing seat, and the horizontal adjustment of the two ends of the taper head 401 at the end of the oil floating bearing seat. When measuring the device, take the two ends of a single oil floating bearing seat as the taper fulcrum and the center point of the core reference, and install two 0.1 micron cameras 501 with a measuring scale magnifying glass with a resolution of 500 times or more. The camera 501 is placed perpendicular to the top of the taper head 401 at 90 degrees, and its main function is to measure the XY direction. Rotate the taper head 401 on the oil floating shaft at a slow speed for a few weeks to measure the rotary swing el...
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