Capacitive flexible touch sensor and manufacturing method thereof

Abstract

The invention relates to the field of touch sensors, in particular to a capacitive flexible touch sensor and a manufacturing method thereof. The touch sensor comprises a plurality of sensing units which are arranged in a manner of M rows * N columns, and each sensing unit comprises a surface protruding layer, a floating polar plate, a dielectric layer, a first lower-layer capacitor polar plate, asecond lower-layer capacitor polar plate, a lower-layer substrate, a first electrode and a second electrode that are successively attached and connected, and the first lower-layer capacitor polar plate and the second lower-layer capacitor polar plate are arranged on the same surface of the lower-layer substrate respectively, and the problem that in the prior art, the capacitor polar plates must belocated on the two different planes which are opposite to each other, and are easy to be damaged due to excessive stress during use is solved. Meanwhile, the touch sensor provided is mainly preparedfrom a PDMS material and a PI material, the flexibility of the whole sensor is large, and the sensor can be installed on a mechanical arm with different radians.

Description

technical field [0001] The invention relates to the field of tactile sensors, in particular to a capacitive flexible tactile sensor and a manufacturing method thereof. Background technique [0002] The sense of touch is an important sense of the human body's perception of the outside world. It is the feeling of itself or the outside world for living beings. It is generally caused by pressure and traction acting on the tactile receptors. With the development of industry, especially in the development process of the manipulator industry, if the manipulator can be equipped with a sense of touch, the intelligence of the manipulator will be greatly improved. Existing manipulators capable of realizing tactile functions mainly recognize target objects or various physical information of objects through tactile sensitive components, such as the magnitude of contact force. At the same time, the flexible tactile sensor has become a new research point in the field of manipulator tactil...

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Problems solved by technology

[0005] The purpose of the invention of the present invention is: in order to solve the existing problems in the prior art, that is, the problem of insufficient sensitivity of the sensor in the prior art, and when the existing capacitor plates are respectively distribu

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