The invention discloses an aluminum
nitride detector with a full-vertical structure and a preparation method of the aluminum
nitride detector. The aluminum
nitride detector comprises an aluminum nitride substrate, a first
semiconductor and an
anode metal laminated layer which are arranged on the upper surface of the substrate, and a second
semiconductor and a
cathode metal laminated layer which are arranged on the lower surface of the substrate,
ohmic contact electrodes are formed on the surfaces of the first
semiconductor and the second semiconductor respectively, and mesa terminals are formed on the surfaces, not covered by the
ohmic contact electrodes, of the first semiconductor and the second semiconductor and the upper surface and the lower surface of the aluminum nitride substrate in an
etching mode. After bias
voltage is applied to the full-vertical MSM structure, full collection of energy of high-energy particles is realized; the aluminum-
gallium-
nitrogen interface
layers are introduced to the front surface and the back surface of the aluminum nitride substrate at the same time to realize excellent
ohmic contact, so that the sensitivity and the energy collection rate of the aluminum nitride high-
energy particle detector are improved; and the mesa terminal is prepared by
etching the groove in the area outside the active area, so that electric leakage is reduced, and the energy resolution of the aluminum nitride high-
energy particle detector is further improved.