Two-layer anti-sputtering molecular sink structure for ground electric propulsion test and cooling method thereof
A technology of anti-sputtering and electric propulsion, which is applied in the direction of testing of machines/structural components, measuring devices, instruments, etc., and can solve problems such as poor anti-sputtering ability
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Embodiment 1
[0041] Such as figure 1 , figure 2 and Figure 6As shown, a double-layer anti-sputtering molecular sink for the sputtering effect in the electric propulsion cabin applied in the vacuum chamber of the present invention includes a double-layer anti-sputtering molecular sink cylinder skeleton 1 and a cylinder cooling tube plate 2 , support pulley 3, anti-sputtering molecular sink 20 at the secondary end and anti-sputtering molecular sink 21 at the end, the anti-sputtering molecular sink includes a cylinder molecular sink matched with the bulkhead, the anti-sputtering molecular sink at the end and the secondary end The anti-sputtering molecule sinker, the end anti-sputtering molecule sinker 21 is fixed on the double-layer anti-sputtering molecular sinking shell frame 1 by bolts, the secondary end anti-sputtering molecular sinking 20 is connected to the double-layer anti-sputtering molecular sinking shell frame An integrated design is adopted, and the distance between the anti-s...
Embodiment 2
[0051] Apply the above-mentioned method of double-layer anti-sputtering molecular subsidence refrigeration, such as figure 2 As shown, specifically:
[0052] (1) Open the cylinder pipeline coolant control valve 801, the end molecular sink infusion tube coolant control valve 802 and the skeleton pipeline coolant control valve 803, start the cooling cycle system, The coolant is introduced, and at the same time, the pipeline temperature and cooling speed are adjusted by opening the cylinder pipeline coolant control valve 801, the end molecular sink infusion pipeline coolant control valve 802 and the skeleton pipeline coolant control valve 803. When the temperature of the cooling tube plate 2, the anti-sputtering molecular sink 21 at the end and the anti-sputtering molecular sink 20 at the secondary end reach the minimum, close the cooling liquid control valve 801 of the cylinder pipeline and the cooling liquid control valve 801 of the end molecular sinking infusion tube. Valve ...
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