Spatial self-focusing laser differential confocal Raman spectroscopy imaging detection method and device thereof

Abstract

The invention relates to a spatial self-focusing laser differential confocal Raman spectroscopy imaging detection method and a device thereof, and belongs to the technical fields of spatial optical imaging and spectral measurement. The spatial self-focusing laser differential confocal Raman spectroscopy imaging detection method comprises the following steps: performing nondestructive separation onRayleigh scattered lights and Raman scattered lights, accurately controlling a telescope system to automatically adjust a focus point through searching a response zero crossing point by using the characteristic of the zero crossing point of the differential confocal response curve of detector, accurately corresponding to the focus position, in order to make an excitation beam automatically focused on a measured object and obtain the spectral information of the focal point position of laser spots, and acquiring the image and pattern information of a target through the image detector; and the device realizes spatial automatic focusing spectral detection and image acquisition, so the method and the device can realize the spatial self-focusing spectrum and image detection of a sample. The method and the device have the advantages of automatic focusing, accuracy in positioning, large spatial range, high spectral detection sensitivity, and acquisition of the target image.

Description

technical field [0001] The invention relates to the technical field of spatial optical imaging and spectral measurement, in particular to a detection method and device for spatial self-adjusting laser differential confocal Raman spectral imaging. Background technique [0002] Laser confocal Raman spectroscopy testing technology is a new technology that combines spatial imaging technology and Raman spectroscopy analysis technology. In the case of interference from surrounding substances, the structure and composition of the material components of the photographed sample can be obtained, providing better molecular "fingerprint" features. It can not only observe the Raman spectrum signals of different micro-regions in the same layer of the sample, but also observe the Raman signals of different layers of the sample space depth, and perform spatial scanning on the sample to be tested, so as to achieve the goal of carrying out the test without damaging the sample. The effect of ...

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Problems solved by technology

[0006] Aiming at the deficiencies of the prior art, the present invention provides a space self-adjusting laser differential confocal Raman spectroscopy imaging detection method and device, which solves the pr

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