Cooling system and thermal evaporator

Abstract

The invention provides a cooling system. The cooling system comprises a cooling plate, water storage tanks and a temperature controller, wherein the cooling plate comprises a plurality of cooling areas, the plurality of cooling areas are correspondingly provided with water circuits, and the water circuits comprises water inlets and water outlets; the temperature controller is used for adjusting the temperatures of water stored in the water storage tanks, the water storage tanks are used for conveying water to the water inlets and recovering water from the water outlets, and the temperatures ofwater flowing in the water circuits of the plurality of cooling areas are different. According to the cooling system, the plurality of cooling areas are divided on the cooling plate, furthermore, theplurality of cooling areas are correspondingly provided with the water circuits, the plurality of water circuits are supplied water by the water storage tanks, and the temperature controller adjuststhe temperatures of the water in the water storage tanks, and therefore, the temperatures of the water in the plurality of water circuits are different, in the OLED evaporation process, the temperatures of all the parts of a glass substrate are adjusted by the water circuits of the plurality of cooling areas on the cooling plate, the glass substrate can be guaranteed to be uniformly heated, and the yield of an evaporation coating layer is improved.

Description

technical field [0001] The invention belongs to the technical field of OLED production, and in particular relates to a cooling system and an evaporation machine. Background technique [0002] The cooling plate (Cooling Plate) of the OLED evaporation machine has two main functions. One is to make the evaporated glass substrate lean against the flat surface of the cooling plate for evaporation to play a supporting role; the other is to cool it through the cooling plate. The water circuit controls the temperature of the evaporated glass substrate, so that the heat carried by the evaporation material evaporated from the evaporation source will not cause the glass substrate to be thermally deformed, thereby causing the position deviation of the evaporated film layer. [0003] The cooling water circuit of the existing cooling plate is a water circuit arranged on the entire surface of the cooling plate, and only one water inlet and water outlet are provided, which is consistent wit...

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Problems solved by technology

[0003] The cooling water circuit of the existing cooling plate is a water circuit arranged on the entire surface of the cooling plate, and only one water inlet and water outlet are provided, which is consistent with the temperature control as a whole, and the temperature change on the glass substrate is due to the evaporation material The relative position is different, there are differences, uneven

The overall consistent temperature control cannot make corresponding adjustments to different locations with uneven heating

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