Sheet and composite sheet
A chip and front layer technology, applied in the field of wafers and composite wafers, can solve problems such as inability to ensure reliability
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Embodiment approach 1
[0026] (composite sheet 1)
[0027] Such as figure 1 As shown, the composite sheet 1 is in a roll shape. The composite sheet 1 includes a release liner 13 , sheets 71 a , 71 b , 71 c , . . . , and 71 m arranged on the release liner 13 (hereinafter collectively referred to as “sheet 71 ”). The distance between the piece 71a and the piece 71b, the distance between the piece 71b and the piece 71c, ... the distance between the piece 71l and the piece 71m are fixed.
[0028] Such as figure 2 As shown, sheet 71 comprises pre-sintered layer 11 . The sheet 71 also includes the dicing sheet 12 disposed on the pre-sintering layer 11 . The dicing sheet 12 includes a base material 121 and an adhesive layer 122 disposed on the base material 121 . Both surfaces of the pre-sintering layer 11 are defined by a first main surface in contact with the adhesive layer 122 and a second main surface opposite to the first main surface. The second main surface is in contact with the release lin...
Embodiment
[0074] The present invention will be described in detail below using examples, but the present invention is not limited to the following examples unless the gist is exceeded.
[0075] [Raw materials of pre-sintered sheets, etc.]
[0076] Adjusted ANP-1: The amount of the viscosity-adjusting solvent contained in ANP-1 (a paste in which nano-sized silver particles are dispersed in a binder) manufactured by Applied Nanoparticle Laboratory Corporation was appropriately adjusted.
[0077] Copper fine particles: Copper fine particles with an average particle diameter of 200 nm and a crystallite diameter of 31 nm manufactured by Mitsui Metal Mining Co., Ltd.
[0078] MM-2002-1: MM-2002-1 (acrylic polymer) manufactured by Fujikura Kasei Co., Ltd.
[0079] QPAC40: QPAC40 manufactured by Empower Corporation (polypropylene carbonate with a weight average molecular weight of 50,000 to 350,000)
[0080] Terusolve MTPH: Terusolve MTPH (high viscosity terpene alcohol) manufactured by Nippo...
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Abstract
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