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Nanometer press printing substrate curing device

A curing device and nano-imprinting technology, applied in optics, optomechanical equipment, instruments, etc., can solve the problems of long curing time, health impact of operators, poor curing effect, etc., and achieve easy operation, good curing effect, and solidification short time effect

Active Publication Date: 2018-06-22
NANKAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing UV curing technology has many disadvantages. Firstly, the curing time is long. Secondly, the curing process needs to be carried out in a special UV curing room. If the ultraviolet rays leak out, it will affect the health of the operators. Finally, the existing universal ultraviolet The curing method cannot guarantee that each imprinted part can be uniformly cured, resulting in poor curing effect

Method used

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  • Nanometer press printing substrate curing device
  • Nanometer press printing substrate curing device
  • Nanometer press printing substrate curing device

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Embodiment Construction

[0021] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0022] Such as figure 1 As shown, the embodiment of the present invention includes a base 1, on which a plurality of fixing grooves 2 are opened in a rectangular array, and a lifting mechanism 3 is arranged in the fixing groove 2, and the lifting mechanism 3 is a lifting oil cylinder, and the structure must be an oil cylinder In order to ensure sufficient supporting force, the end of the lifting part of the lifting mechanism 3 is provided with a substrate sheet 4, an embossed rubber layer 5 is arranged on the substrate sheet 4, a spectroscopic device 6 is arranged between two adjacent fixing grooves 2, and the fixing groove The groove wall of 2 is provided with a light-transmitting part 7 for light transmission. The bottom of the spectroscopic device 6 is provided with an ultraviolet light source 8, which is an ultraviolet LED. This embodiment also includes ...

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Abstract

The invention relates to a nanometer press printing substrate curing device, which comprises a base, wherein a plurality of fixing grooves are formed in the base in a rectangular array mode; an ascending and descending mechanism is arranged in the fixing groove; the ascending and descending end part of the ascending and descending mechanism is provided with a substrate sheet; a press printing gluelayer is arranged on the substrate sheet; a beam splitting device is arranged between the two adjacent fixing grooves; a light transmission part used for light transmission is arranged on the groovewall of the fixing groove; an ultraviolet light source is arranged at the bottom of the beam splitting device. The nanometer press printing substrate curing device has the advantages that the curing time is short; the curing effect is good; in addition, ultraviolet rays are not emitted out in the curing process, so that the operation by operators is convenient.

Description

technical field [0001] The invention relates to the technical field of nanoimprinting devices, in particular to a nanoimprinting substrate curing device. Background technique [0002] The nanoimprint technology is to first coat a thin layer of thermoplastic polymer material on the substrate. Raise the temperature and reach above the glass transition temperature Tg of this thermoplastic material. When the thermoplastic material is in a high elastic state, the viscosity is reduced and the fluidity is enhanced, and then the nanoscale mold is pressed on it, and an appropriate pressure is applied. The thermoplastic material will fill the cavity in the mold. During this process, the thickness of the thermoplastic material should be greater than the cavity height of the mold to avoid damage caused by direct contact between the mold and the substrate. After the molding process is complete, the temperature is lowered to solidify the thermoplastic material so that it can have a coin...

Claims

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Application Information

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IPC IPC(8): G03F7/00
CPCG03F7/0002
Inventor 徐晓轩王斌梁菁车颖徐阳阳时金蒙文虹镜杨江涛林宝志
Owner NANKAI UNIV