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Coating liquid supply device

A technology for supplying device and coating liquid, which is applied in the direction of device and coating for coating liquid on the surface, which can solve the problems of fluctuation of coating amount, deformation of bellows member, inconsistent amount, etc., and achieve the effect of improving accuracy

Active Publication Date: 2018-06-29
CHUGAI RO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, when the rod is pushed in when the coating liquid is discharged, the bellows member is deformed due to the pressing pressure of the rod, the amount (volume) of the rod pushed in does not match the amount of the coating liquid discharged, and the amount of coating occurs. Variations lead to technical problems such as difficulty in coating the substrate with a uniform thickness

Method used

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  • Coating liquid supply device
  • Coating liquid supply device
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Examples

Experimental program
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Effect test

other Embodiment approach

[0104] Figure 8 with Figure 9 It is a schematic diagram of the coating liquid supply device in which the protruding member 61 is not attached to the rod 6 in another embodiment of the present invention. Another embodiment is different from the above-mentioned embodiment in that it does not have the protruding member 61, and the other structures are the same as the above-mentioned embodiment. Therefore, in the description of other embodiments, the same reference numerals are assigned to the same parts as those of the above-mentioned embodiment, and the detailed description of the above-mentioned contents will be omitted.

[0105] Such as Figure 8 with Figure 9 As shown, the axial middle portion of the bellows member 8 is mounted on the front end of the rod 6 (the part X1 in the figure), and the front end of the bellows member 8 is closed (the part X2 in the figure). The bellows member 8 includes a first bellows member 81 and a second bellows member 82, one end of the fi...

other Embodiment approach

[0117] In each of the above embodiments, driven by the motor 71 of the drive member 7, the ball screw 72 integrally formed with the rotation shaft of the motor 71 rotates, and the rod 6 moves along the shaft via the support portion 73 screwed to the ball screw 72. Axial reciprocating movement. However, it is also possible to Figure 11 As shown, the rod 6 is reciprocated in the axial direction by the shaft motor 74 .

[0118] The drive member 7 includes: a shaft motor 74 ; and a ball bush 75 supporting the shaft motor 74 .

[0119] According to the present embodiment, since the driving force from the shaft motor 74 is directly transmitted to the rod 6 , the responsiveness of the axial movement of the rod 6 can be improved. In addition, since the ball screw and the support member can be eliminated, the space required for the drive member 7 can be reduced. In addition, it is possible to prevent the rod from being affected by the vibration caused by the rotational motion of th...

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Abstract

A coating liquid supplying apparatus (3) comprises: a container (5) in which the coating liquid is contained; a rod (6) moving in the axial direction in the container (5) and discharging the coating liquid contained in the container (5) from the container (5); and a bellows member (8) separating a coating liquid (P) contained in the container (5) and the rod (6), installed in the rod (6) to form asealed space (9), which is a closed space from the rod (6), and expanding and contracting relative to the axial movement of the bellows member (8), wherein a liquid (W) is sealed in the sealed space(9). Therefore, it is an object of the present invention to provide the coating liquid supplying apparatus (3) capable of improving the accuracy of the coating amount of the coating liquid.

Description

technical field [0001] The present invention relates to a coating liquid supply device suitable for a coating device. Background technique [0002] Conventionally, a rod-type syringe pump is known as a pump for sucking and discharging a coating liquid in a surface coater or the like. However, the above-mentioned pump uses an O-ring or the like for the sliding portion of the rod, and it is necessary to consider the possibility of a small amount of leakage of the coating liquid and bonding. Therefore, as shown in Patent Document 1, a coating liquid recovery chamber is also included outside the O-ring, but the structure becomes complicated and large-scale. In addition, the coating liquid recovery chamber and the rod are finally sealed by the O-ring. , the same technical issues need to be considered. Here, as shown in the bellows 58 of Patent Document 2, there is provided a pump in which the coating liquid does not come into contact with the sliding portion of the rod by utili...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05C11/10B05C5/02
CPCB05C5/0254B05C11/10B05C5/02B05C11/00
Inventor 西尾勤户内八郎魏志丹
Owner CHUGAI RO CO LTD