Method for electrostatic adsorption on substrate with MOS (metal oxide semiconductor) structure
A MOS structure, electrostatic adsorption technology, applied in circuits, electrical components, electric solid devices, etc., can solve problems such as poor electrostatic adsorption effect, achieve good electrostatic adsorption effect, avoid falling off, and improve adsorption effect.
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[0025] A method for electrostatic adsorption to a substrate formed with a MOS structure proposed by the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.
[0026] figure 1 It is a schematic flow diagram of the method for electrostatic adsorption to a substrate formed with a MOS structure in Embodiment 1 of the present invention; figure 2 It is a schematic diagram of the structure of the substrate formed with the MOS structure in the method for electrostatic adsorption of the substrate formed with the MOS structure in the first embodiment of the present invention; the following pr...
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